Used AXCELIS / FUSION I250B #9411427 for sale

ID: 9411427
Vintage: 1996
UV Curing system 1996 vintage.
AXCELIS / FUSION I250B is an exposure equipment designed to produce lithographic printed circuits and micro features for the production of integrated circuits and other electronic components. The system uses advanced software and hardware technology to provide a cost-effective, highly-productive platform for producing semiconductor devices. The core of the unit is the 300mm FUSION tool. AXCELIS exposure machine utilizes a unique combination of Kalina and NEXUS technologies to produce high-resolution images in a wide range of complex pattern shapes and sizes. This includes ultra-fine line widths as well as linear patterns, freeform patterns, and three-dimensional structures. The tool can perform scan exposure with a minimum step size of 125nm and overlay positioned using sub-micron precision. The asset also incorporates a number of advanced maskless lithography systems that can produce high-fidelity patterns without the need for traditional photomasks. These include C3D, a coordinate-based near-field imaging technique, and Hybrid immersion, capable of delivering high-resolution Imaging without the need for optical lens. In addition, the model has been designed to cater for a wide range of resist materials and chemistries. This includes i-line and g-line photoresists, along with contact resists and etch resists. The user-friendly control equipment enables users to control the dosage and exposure times over a wide range of energy and intensity settings. The system also simplifies the development process for new process applications. This includes features such as the "Hybrid Job" unit, which enables the sequenced programming of multi-stage processes, and "Job Capture" for quick process setup. The machine also features automatic pattern measurement and analysis capabilities. The tool is capable of operating autonomously and in conjunction with other production equipment. It provides a flexible framework for integration into other existing factory environments and is manufactured to meet the highest quality standards. This ensures long-term reliability and product repeatability, making FUSION I250B a reliable and cost-effective tool for high-volume production of patterned circuits.
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