Used AXCELIS / FUSION LC-6 #93376 for sale

AXCELIS / FUSION LC-6 is a high-precision, high-productivity exposure equipment designed for the most complex lithographic requirements of today's chip fabrication industry. FUSION LC-6 can be used for Deep UV photolithography, E-Beam lithography, and direct-write processes, providing users with unmatched accuracy and flexibility. Featuring a custom-designed imaging module, AXCELIS LC-6 delivers precise performance across a range of process and exposure settings. The system is capable of 1-nuclear-off photomask defects at 22 nm, and can synchronize multiple exposure heads to achieve highly precise isomer arrays. LC-6 is equipped with a number of advanced technologies to ensure precise, repeatable results. These include a Uniformity Module with a proprietary architecture to ensure uniformity across the entire field of view, and a proprietary Wavefront Deviation algorithm to adjust for distortion. The unit is also equipped with the FACSEL array tool for precise, non-destructive analysis of backside images. AXCELIS / FUSION LC-6 is designed for process tolerance and reproducibility. A range of process settings can be adjusted for specific applications, with defect monitoring and post-exposure process analysis available for further fine-tuning of settings. Parameters can also be adjusted for environmental changes, with options for real-time temperature and humidity monitoring throughout the entire exposure process. FUSION LC-6's robust optical design ensures long-term performance, with a DOE-free design to minimize vibration, improve linearity, and eliminate image artifacts. The machine is also designed to minimize maintenance, with automatic cleaning of optics, a maintenance-free drive, and full remote software support for day-to-day operations. Overall, AXCELIS LC-6 is an advanced, high-precision exposure tool designed to meet the most demanding requirements of the chip fabrication industry. The asset's robust, feature-rich design enables it to provide highly accurate and repeatable results, while its range of advanced technologies helps maximize process flexibility and reproducibility.