Used AXCELIS / FUSION M 150PC #293619554 for sale

AXCELIS / FUSION M 150PC
ID: 293619554
Wafer Size: `6"
Vintage: 2010
Photo stabilizer, 6" 2010 vintage.
AXCELIS / FUSION M 150PC is an advanced exposure equipment designed to meet the most demanding applications in the field of microelectronics. The system offers exceptional reliability and repeatability through advanced technology, design, and automation. The unit is driven by a high-performance beam source with advanced optics to ensure a range of highly uniform energy and dose levels. Five-axis XYZ robotic arms provide the most precise and reliable sample delivery without sacrificing speed and accuracy. This machine also features a low-cost sub-micron stepper with ultra-fast procession speed of 6ns, accurate dose levels +/- 0.25%, long-wave exposure wavelengths of deep-UV light, as well as high throughput thanks to a fully automated online film control and exposure optimization module. FUSION M150PC offers precision and speed with low cost of ownership and operation. With its robust and intuitive user interface, the tool is flexible enough to support a wide range of processes. It delivers high-accuracy dose and exposure control, with a precision of up to 0.1% accuracy. The asset further is equipped with built-in resolution and drifting compensation algorithms for better process control, as well as adjustable process windows for automated wafer handling and on-the-fly recipes. Because of its rapid wafer cycle times, AXCELIS M 150 PC model makes efficient use of resources to provide excellent productivity, while also offering consistent and reliable results with increased yield. The use of real-time process feedback also supports the equipment in ensuring long-term process stability. The system is CE, EMC, and UL compliant, and its ultra-low vibration resonance ensures that it operates smoothly and quietly while reducing downtime. FUSION M 150PC is one of the most advanced exposure systems available, and offers unbeatable performance and reliability. It is ideal for production and research applications in microelectronics, enabling high-throughput and high-yield processing. With its advanced optics and robotic arms, as well as its multiple user-friendly features, it is an excellent choice for all types of exposure jobs.
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