Used AXCELIS / FUSION M 150PC #293619557 for sale

AXCELIS / FUSION M 150PC
ID: 293619557
Wafer Size: 6"
Vintage: 2010
Photo stabilizer, 6" 2010 vintage.
AXCELIS / FUSION M 150PC is a High Resolution Direct Imaging formation for microelectronic fabrication that allows for precise exposure and imaging of wafers. This equipment offers excellent performance and features to meet the demands of complex device production. FUSION M150PC utilizes the latest technologies to deliver high speed and accuracy. The system offers advanced control of optics, stage and substrate, a top-of-the-line precision stage with low inertia, excellent repeatability, and large working envelope. Additional features include a 15 inch digital flat-panel monitor providing real-time image feedback, and a wide range of wavelength and illumination configurations to accommodate diverse requirements. AXCELIS M 150 PC provides excellent pattern overlay repeatability and stability, thanks to its optimized design. The unit's digital update board and high-speed control CPUs ensure control stability and precision resulting in excellent pattern reliability and accuracy. The machine features high speed processing with excellent focus accuracy and overshoot control, along with dynamic focus feedback to ensure repeatable results in harsh process environments. The tool allows for a variety of precision exposure configurations for optimum processing of a wide range of device types. FUSION M 150PC offers a unique design that reduces contamination, eliminates optics distortion, and provides high stability. Its capacity to output more than 150 wafers per hour makes this asset perfect for high-volume production. The model features an advanced control equipment that offers a wide range of data processing and parameter measurement functions. Its active digital control board is able to process a wide range of environmental parameters allowing for greater accuracy and efficiency. Additionally, FUSION M 150 PC has built in safety features that make it a safe system to use. Overall, AXCELIS M150PC is a powerful and reliable high-speed direct imaging unit that offers excellent performance, precision and accuracy with minimal contamination. Utilizing an advanced machine design, this tool will provide unsurpassed discipline and speed in production.
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