Used AXCELIS / FUSION M 150PC #293823986 for sale
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AXCELIS / FUSION M 150 is an exposure equipment designed for precision wafer lithography. The system is capable of delivering a high degree of accuracy and repeatability with low levels of distortion. The unit includes a stepper/sorter, a scanner, and an exposure chamber. The stepper/sorter is an automated camera machine with a precise control tool that accurately places the wafers on the exposure apparatus. The asset can handle several different types of wafers, including those with different heights and pitches. The stepper/sorter also utilizes a smooth and efficient movement of the wafer along the exposure axis to maintain accuracy and speed up throughput. The scanner is a laser-based model which can read specific information about the wafer and then project it onto the substrate. The scanner is capable of scanning at resolutions of up to 10 megapixels, providing a high degree of accuracy and repeatability. The scanner includes features such as scan speed adjustment, calibration, and automatic error correction. Finally, the exposure chamber is a sealed environment which protects the wafer from external sources of contamination. It is controlled by a pneumatically-actuated piston drive that moves the wafer in synchrony with the light source. The exposure chamber also includes temperature and humidity sensors, as well as software-based metrology tools which ensure accurate exposure of the wafer. Overall, FUSION M 150 is a reliable and accurate lithography tool with a high level of precision and repeatability. The equipment enables integrated circuits to be developed with maximum yields, speeds up the wafer fabrication process, and helps to reduce costs. It is suitable for a range of applications from creating small-scale displays to the production of highly complex integrated circuits.
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