Used AXCELIS / FUSION M 150PC #9114863 for sale

ID: 9114863
Wafer Size: 6"
Photostabilizer, 6" Includes: Cabinet with SST panels Wafer chuck assembly (2) Cassette elevators (2) Wafer handling robots AC Distribution box Empty card cage Cables.
AXCELIS / FUSION M 150PC is a high-end optical exposure equipment designed for optimal performance in semiconductor device manufacturing. It is ideal for small die and large wafer production, making it an ideal choice for advanced microchip fabrication processes. FUSION M150PC features a unique collimated projection optical system, which includes two individually adjustable 2-axis 7.5 inch mirrors, a 5-inch wavelength Multiple View Objective (MVO) lens and a 0.65x field mask optical path. The target image is projected uniformly onto a digital image processing processor for precise control. The unit also includes a power supplier, an auto focus machine and a burn-in unit for wafer testing and planarization. With its advanced features, it offers maximum flexibility and processing speed. The tool can be configured to accommodate a variety of digital image formats and resolutions, including JPEG, TIFF, BMP, and CMYK. The maximum resolution is set to 20,000 points per inch (ppi), making it ideal for the sensitive processing of complex graphics and text. The automated focus control is able to detect slight changes in the subject's position and precisely adjust the focus in order to guarantee consistency in the exposed layer's quality. Furthermore, AXCELIS M 150 PC also supports multiple layer exposure modes. The robust design of the asset allows users to efficiently switch and adjust exposure parameters with minimal loss in efficiency. In addition, its proprietary liquid crystal shutter model provides the flexibility to expend exposure times from the conventional 0.25 millisecond up to 999 milliseconds, allowing for fine control and enhanced image quality. With a user-friendly LCD touch-screen, AXCELIS M150PC offers an intuitive graphical user interface for setting exposure times, the exposure area and layer exposure parameters. Comfortable and efficient operation is further enhanced with a dual-zone exhaust equipment which keeps the chamber clean and ensures stability in the temperature and humidity levels. Overall, FUSION M 150PC is a reliable and efficient exposure system which offers superior performance and flexible features for an array of advanced processing techniques. It is optimal for applications that require clean and uniform exposure, such as semiconductor device manufacturing for microelectronics, optoelectronics and MEMS technologies.
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