Used AXCELIS / FUSION M 150PC #9241901 for sale

AXCELIS / FUSION M 150PC is an advanced cost-efficient exposure equipment that is designed for high-volume photomask production. With its high throughput, high-quality images, and advanced automation, it is the ideal solution for fabricating a variety of photolithography masks, including those for display LCDs. This system offers an innovative, integrated optical design with two ion pumps and two wafer-loading station options. It also features next-generation electronics, including a large-sized, easy-to-use touch-screen interface and a motion controller, as well as an autofocus unit to ensure high-precision and optimal feature placement. FUSION M150PC also offers a variety of features to improve systematic performance. These features include a high-powered ion pump for efficient film development in a range of gases, and a large-area polarizer and emitter along with adjustable apertures to enable the production of high contrast, low distortion, and large-area images. The machine also boasts a ProX-like Full Range Scanner (FRS) to enable fast scan-move times, as well as an intuitive Focal Alignment Tool (FAS) for auto alignment of the shotfield. It also has an advanced multilayer lithography asset with adjustable energy relative to the substrate. In addition, This model has an automated wafer-handling mechanism that enables fast and efficient batch processing. This wafer-handling mechanism comes with four robots - one for loading and unloading wafers from the station, two for inspection and cleaning, and one for separating. The robots can be used for batch processing with multiple wafers for increased throughput. In addition, the load/unload module also comes with an automatic collision detection equipment that helps ensure no damage to the reticles and other components. AXCELIS M 150 PC allows for a wide variety of photomask types to be produced, including aluminum and quartz masks, as well as transfers from different substrates. It also offers a variety of resolutions, ranging from 50 nm to 500 nm. Furthermore, this system is capable of mitigating overlay errors, allowing for precise photomask alignment and increased yield. Overall, AXCELIS / FUSION M 150 PC is a cost-efficient, high-performance exposure unit that offers a host of features to streamline, simplify, and improve photomask fabrication. With its high throughput, advanced automation, and intuitive touch-screen interface, it is the perfect tool for fabricating top-quality photomasks for LCD and Display applications.