Used AXCELIS / FUSION M 150PC #9399679 for sale

AXCELIS / FUSION M 150PC is an unified, high-performance exposure equipment used for a variety of lithography applications. It is designed to meet the most stringent imaging requirements across a range of feature sizes and pitch accuracy levels. The system has a high speed multi-functional transfer platform that is compatible with reticles of up to 375mm. It includes an automated handling unit for up to 30 reticles and a laser viewer for alignment and verification. FUSION M150PC includes a high-end optical pattern generator that utilizes a combination of cutting edge technology and advanced image processing algorithms to generate a range of shot sizes with excellent accuracy and repeatability. AXCELIS M 150 PC is also equipped with a multi-level laser exposure head. It has a maximum power of 150W and can expose shots at a speed of up to 250μm/s. The laser is designed to deliver high fidelity images with exceptionally low lines and space variations. AXCELIS / FUSION M150PC combines real-time focus control, advanced alignment control, and error correction features to maintain optimum image control. The automated process control machine ensures repeatable results on each run with enhanced process tool control features. The tool also features iCure, a next-generation lithography runtime software. This software is designed to identify, analyze, and correct any issues that may arise during an exposure, allowing for more efficient and reliable product development. The result is a flexible, reliable, and high performance exposure asset with maximum motion stability, excellent repeatability and accuracy, and enhanced process control capabilities. FUSION M 150PC is a great choice for increasing production efficiency and quality in a wide range of lithography applications.