Used AXCELIS / FUSION M 150PCJ #9095711 for sale

AXCELIS / FUSION M 150PCJ is an advanced, cost-effective exposure equipment for deep UV LED applications. This system enables high-end performance over a wide range of sub-micron substrates. Using proprietary technologies such as LED-assisted, Direct Imaging (DIDI) and a variety of Digital Height Control (DHC) options, FUSION M 150PCJ provides superior accuracy for imaging and feature sizes. AXCELIS M 150PCJ is designed with an integrated measurement and control unit that ensures precision of operation, precise image transfer, and dynamic response. This includes a thermal managed cooling machine that stabilizes the exposure chamber for optimum performance. The Direct Imaging Technology (DIDI) strengthens the overlap between the exposure and imaging layers, while also providing greater contrast resolution of feature sizes on the substrate. The Mach 2.0 module of FUSION incorporates advanced Digital Height Control (DHC) options, which allow for precise alignment of different layers and multi-focus exposure routine. Through this capability, fine pitch and uniformity of features across many substrates can be achieved. Additionally, M 150PCJ supports in-situ cleaning capabilities, prompting more efficient substrate processing and improved yield and tool performance. AXCELIS / FUSION M 150PCJ features an ergonomic design, allowing for efficient and precise handling of the process. Furthermore, the asset's intuitive user interface and real-time remote monitoring capabilities enable rapid feedback to the operator, facilitating prompt adjustments if required. In addition, the model supports a variety of cleaning processes such as auto-focus cleaning, deep cleaning, and B-stage cleaning. All in all, FUSION M 150PCJ a versatile and highly precise exposure equipment that can meet the needs of deep UV LED applications. Its integrated layer control technology and automated workflow enable quick setup and efficient operation. Moreover, its ergonomic design and cost-effective operation make it an ideal solution for maximum system performance.