Used AXCELIS / FUSION M 150PCU #9235795 for sale

AXCELIS / FUSION M 150PCU is an industrial-grade photoresist exposure equipment designed for production-level lithography processes, such as on wafer, substrates and mask making. The system is highly flexible and offers features such as automated substrate and mask changers, stereo-lithography, and adjustable exposure area. FUSION M 150PCU is built with a comprehensive software package to support highly repeatable exposures with speed and precision. The software gives users full control over light levels and acquisition times in both dry and wet processes. Additionally, it allows for positioning accuracy of up to 0.1 mm over a wide exposure range. It also enables long-term exposure consistency with a variable speed, multi-zone scan routine. AXCELIS M 150 PCU consists of a high-precision servo-controlled stepper and controller, photo-sensor, and software platform. The controller is equipped with its own integrated microprocessor and electronics for interfacing with the photo sensor. The photo-sensor itself contains a high-accuracy optical unit, allowing for more accurate control of output power and exposure times compared to standard profilers. The machine is also equipped with a high-end XY positioning tool, providing precision accuracy over a wide area. Additionally, it includes a vacuum chuck asset to ensure samples are held firmly in place during exposure. The model can also be equipped with an anti-reflective coating equipment, to help reduce the risk of static build up on the wafer during the exposure process. FUSION M 150 PCU has built-in safety features, including dedicated air filters and specialist shielding to protect personnel from harmful radiation, and a built-in emergency shut-off system. The unit is also extremely reliable, with an uptime of 99.9%. Overall, M 150PCU exposure machine is an excellent choice for process-critical lithography processes. It is robust, easy to use and highly flexible, offering laser precision and reliability for a wide variety of applications.