Used AXCELIS / FUSION M 150PCU #9293816 for sale

AXCELIS / FUSION M 150PCU is an intermediate-performance exposure equipment designed for a variety of applications requiring both single and multi-exposure capabilities. This machine features a new 6-axis motion system which provides the flexibility to adjust and customize X or Y incidents in 1-axis, 2-axis, or 3-axis configurations. FUSION M 150PCU warm-up time has been improved over similar systems, with a 2 minute warm-up time for up to 6 axes. This unit is designed to operate in linear increments of 1 micrometer and offers an overall accuracy of ±2% over a 20-mm scan range. The machine also has a high resolution of 22 nanometers, allowing for greater selectivity and accuracy with alignment, contact, and imaging applications. Sub-exposure functionality and integrated autofocus and intuitive navigation makes AXCELIS M 150 PCU suitable for rapid designs and the best possible feature and pattern fidelity. This machine comes with a variety of standard features, including multiple energy level selections, variable scan speed and variable dosimetry, as well as comprehensive advanced safety features such as scanning barrier guard, aligner, and scan in situ. It also comes with a comprehensive diagnostic package to ensure that tool performance remains within specification at all times. The asset is powered by an easy-to-use Graphical User Interface, providing simplified and automated operation. This interface also provides comprehensive online data logs and statistical process control, allowing users to monitor and track process performance in real time. Additionally, the model offers comprehensive support for specialty chambers up to 200cm in width and a variety of calibration procedures. FUSION M 150 PCU is suitable for a variety of key applications, including nanolithography, laser-ablation, and motion control in the life sciences and microelectronics sectors. It is an ideal choice for customers looking for an intermediate-performance exposure equipment in cost-effective and reliable design.