Used AXCELIS / FUSION M 150PCU #9355456 for sale

ID: 9355456
Lithography system, 6" Process type: Photo stabilizer Mechanical chuck Chambers / Bath Cassette Alarm box Manuals Power supply: 400 V, 14 Amps, 3 Phase.
AXCELIS / FUSION M 150PCU exposure equipment is a sophisticated tool for advanced lithographic processing of wafers. It is specifically designed to be both accurate and fast. It features a long working distance and wide field of view, allowing for precise alignment of the reticle onto the wafer. Additionally, its fast exposure rate and short exposure time keep workflow consistent and efficient. The system is ideal for a range of lithographic processes, including direct UV laser exposure, UV photoresist coating, and post-coating alignment. Its fast exposure rate is due to a four-lens optical unit with a floating-field imaging machine. This four-lens optical tool has a small numerical aperture, which reduces diffraction and increases resolution. The asset also features a Auto Focus function to quickly bring the wafer into the optimum focus position. FUSION M 150PCU provides high accuracy for critical imaging tasks with its integrated auto-alignment feature. The auto-alignment feature quickly and accurately aligns the reticle onto the wafer for a properly uniformed exposure pattern. In addition, its adjustable focus feature ensures that all images have the same focus distance, ensuring consistent exposure and reproducibility of results. The model is also designed to facilitate easy wafer handling and loading. It has a quick wafer access chamber that swings open easily, allowing wafers to be quickly loaded and unloaded. Furthermore, its automated wafer alignment equipment reduces misalignment concerns and helps to quickly position the wafer onto the imaging stage. Overall, AXCELIS M 150 PCU exposure system is a great tool for fast and accurate lithographic processing of wafers. Its features allow users to quickly and accurately align the reticle onto the wafer, ensuring a uniform exposure pattern and reproducible results. With an adjustable focus unit and automated wafer alignment, the machine is sure to help facilitate smooth and efficient workflow in any microfabrication process.
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