Used AXCELIS / FUSION M 150PCU #9391701 for sale

AXCELIS / FUSION M 150PCU is a state-of-the-art exposure equipment designed for the semiconductor manufacturing industry. It utilizes high-end optical components and advanced scanning capabilities to provide a superior resolution and precision for the manufacture of highly complex semiconductor devices. The system consists of a lens assembly, a scanner, light source, exposure control and wafer tracking components. The lens assembly provided with the unit is an optimized achromat with low static astigmatism, excellent color correction and high resolution. It has an effective aperture of 200 mm and a dual optical path, which enables it to deliver up to 201 mm total projection area. The scanner is comprised of a multi-axis scan arm, a high quality slit-scan camera and an IR detector. Its advanced features allow for the rapid scanning and acquisition of various exposure levels and wafer locations. The exposure control has adjustable settings that can accurately control the exposure time, dosage, patter size and scan rate. Additionally, the machine is equipped with a high-speed wafer tracking tool that is capable of tracing up to 180 wafers per hour with repeat accuracy of 0.5 mm. The asset also integrates a high-powered light source that is capable of exposing over 8,000 wafers per hour. The light source consists of a programmable array of emitters and a reflector with adjustable settings for the wavelength and type of emission. This allows for an optimum exposure of the semiconductor devices. Finally, the model is also capable of precise temperature control of the wafers with a temperature range of 4-40ºC. This ensures that the exposure process is uniform, eliminating any defects due to thermal gradients. FUSION M 150PCU is a powerful tool for the semiconductor industry, allowing companies to manufacture more complex and high quality devices with greater precision and efficiency. Its advanced features, coupled with its robust design and compact form factor make it one of the most reliable and versatile exposure systems available in the market today.