Used AXCELIS / FUSION M 150PS #293616814 for sale

AXCELIS / FUSION M 150PS
ID: 293616814
Photo stabilizer.
AXCELIS / FUSION M 150PS is a high-end exposure equipment designed for advanced lithography applications in the semiconductor industry. It uses projection optics to shine a precise pattern onto a photoresis surface, enabling the creation of intricate circuit patterns on integrated circuits (ICs). FUSION M 150PS uses a high-power mercury/xenon lamp that provides a strong light source with a wavelength range of 436-451nm. Its projection optics consist of an optical element, a condenser lens, a reticle holder, and a projection lens that together provide a magnification of 150x. This optical path is synchronized to a step and repeat motion system, which moves the reticle pattern to quickly and precisely pattern large areas of an IC. The unit also features a vacuum machine that maintains the pressure inside the exposure chamber and helps ensure the highest levels of precision during the exposure process. In addition, AXCELIS M 150PS includes multiple safety features to protect the operator from harmful radiation and other potential hazards. The advanced features of M 150PS make it ideal for high-volume lithography applications such as chip packaging and microprinted components. It also enables exceptional throughput, with consistent image quality over large ICs. The powerful blade scanner ensures quick and accurate exposure of even the most complex patterns, providing excellent performance and reliability in cost-sensitive production environments. Overall, AXCELIS / FUSION M 150PS is an excellent choice for typical multi-project wafer processes, including those for medical devices and telecoms. Its flexibility and robust design make it suitable for a wide variety of lithography applications.
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