Used AXCELIS / FUSION M 200 PCU Polo #9258174 for sale

AXCELIS / FUSION M 200 PCU Polo is a high-precision exposure equipment. It utilizes a microscope-like setup, where a reticle is mounted on an x-y stage and a wafer is used to capture the image. The reticle is placed on the x-y stage and aligned with the wafer. The reticle is then moved in the x and y directions under the microscope to position it for exposure. The system is designed to provide accurate and repeatable exposures with excellent resolution. Its high-resolution optics accurately capture the reticle, allowing it to deliver accurate exposures at low levels. This unit also has a motorized wafer stage that can accurately present the wafer to the reticle to ensure maximum exposure accuracy and repeatability. FUSION M200 PCU POLO features a digital motion controller which allows for precise control of the x-y stage and wafer positions. It is capable of delivering exposure times from milliseconds to hours, as well as exposure doses that range from a few nanograms to milligrams, and can keep exposures within ± 1%. In addition, it offers a wide range of light sources such as LED, Krypton, Mercury Arc, and DUV lamps, as well as filter options such as narrowband adjustment and anti-reflection filters. The exposure machine also features several safety features. It offers automatic wafer edge alignment with automatic edge-detection algorithms and an independent safety tool. This ensures accurate alignment of reticle with minimum potential to damage the wafer or reticle. It also has automatic detection of reticle movement and stops the exposure and retracts the reticle promptly if unintended shift occurs. Finally, AXCELIS M 200 PCU-POLO is equipped with a data logging asset. This model records exposure time and dose in real-time and can be used for process control and defect analysis related purposes. It can also record position, temperature, humidity, and other environmental conditions to ensure even exposure and process repeatability. Overall, AXCELIS M200 PCU POLO is an advanced and robust exposure equipment capable of providing repeatable and accurate exposures with superior resolution. Its safety features provide an additional level of protection and its data logging capabilities ensure accurate logging for process control and defect analysis purposes.