Used AXCELIS / FUSION M 200 PCU #293651753 for sale

AXCELIS / FUSION M 200 PCU is an exposure equipment designed to support production in the semiconductor industry. The system includes an advanced platform for managing, delivering and controlling broadband UV light sources. It is capable of automatically controlling its output power using an adaptive unit. FUSION M200PCU has a quartz-enclosed optical machine and can be directly integrated into scanners, steppers and production decks of all output levels for purposes such as patterning and reticle imaging. With its large range of optical parameters, the tool can accommodate different types of semiconductor substrates and feature sizes. The asset also features a broad range of optical components such as polarization and height sensors as well as a unique beam homogenizer, which provides a uniform intensity distribution. The model is capable of scheduling exposure time and power levels, ensuring that the exact amount of UV radiation is delivered. All equipment functions are programmable and the system supports scan only or scan and control mode. It also has a sophisticated maintenance test unit and is designed to be flexible and support future upgrades. For maintenance and repair tasks, AXCELIS M200 PCU unit is designed to be serviced remotely and will remain operational while the technician is servicing it. The machine also has a robust collection of software that allows for remote tool monitoring and control. This software allows the technician to remotely adjust parameters, adjust the asset setup and troubleshoot any problems. M-200 PCU is designed for high reliability and long service life, requiring little maintenance over the course of its lifetime. The model also features numerous user-friendly features such as an easy-to-use graphical user interface, which offers operators and technicians intuitive access to all equipment functions. AXCELIS M200PCU is a highly programmable and easy-to-use system that is perfectly suited for providing high-quality UV irradiation for semiconductor production and other demanding applications. It is designed to deliver consistently accurate exposures and can be easily integrated into existing production lines.