Used AXCELIS / FUSION M 200 PCU #9145259 for sale

AXCELIS / FUSION M 200 PCU is an leading exposure equipment designed for photoresist coating and baking applications. This system provides consistency in the coating, baking, post-baking, and etching workflows. Its advanced technology ensures precise and repeatable control, better reproducibility in production, and delivered performance. Its advanced components include a wafer robotic loader, a platform mounted conveyor unit, a controlled temperature air, and a variable speed drive motor. The wafer robotic loader has an embedded vision machine to ensure accurate slot to slot handling of wafers. The conveyor tool has an adjustable web jig which enables precise wafer-to-wafer transfer and placement with minimal manual interaction. The temperature and humidity controls ensure uniform temperature and humidity conditions to reduce defects. The variable speed motor can be adjusted for precise and repeatable control of the exposure, bake, and etch operations. FUSION M200PCU has a standard baking oven with a recirculating heated air asset. This baking oven supports wafer exposure for N7, HMBCD, and HOLEMASK/SATICIDE processes. The oven is also equipped with the latest door/program optimization controls to ensure uniformity and optimal process performance. The model also includes an exhaust plenum that removes any unnecessary gaseous buildup. The equipment also features a Variable Height Film Coating Station that automates the deposition of photoresist onto wafer substrates. This station is equipped with a patented air atomizer technique, which provides uniform and precise thickness coating of photoresist films to achieve optimal results. The system also provides optional support for hotplate, bakeplate, and UV exposure operations. AXCELIS M200 PCU is an highly-efficient performance enhancing unit with an advanced technology and support for various exposure operations. This machine ensures precise and repeatable results, providing enhanced operational efficiency, better reproducibility, and overall superior performance.