Used AXCELIS / FUSION M 200 PCU #9284344 for sale

AXCELIS / FUSION M 200 PCU is a fully automated wafer exposure equipment designed with productivity and production throughput in mind. This system is designed to process wafers with a range of 200 mm in diameter. The unit is made up of a high-precision X-Y stage and motion control machine, a high-end pattern generator, and multispectral box illumination and advanced UV optics. The wafer stage has a resolution of 2.5 nanometers. This precision enables fast and accurate printing of complex patterns. This tool offers many features to maximize productivity. It includes an advanced pattern generator called Protec PU, which can generate patterns on-the-fly with a maximum memory of 40 megabytes. The asset also comes with an advanced optical model that delivers stable uniform illumination with an automatic zero shift, as well as overscan capabilities up to 270nm. The equipment also comes with Astra, an integrated inspection tool that enables automated wafer inspection after exposure. A Vision Metrology system and a 3D mapping software are included for the visualization of printed patterns. The unit has a wafer throughput of up to 1200 wafers per hour and is capable of handling up to 500 patterns per hour depending on the layer complexity. It is integrated and provided with an extensive library for optimization scripts, process recipes, and simulation models. Finally, the machine is highly reliable and includes self-diagnostics, as well as several features to guard against errors. FUSION M200PCU is an extremely versatile and powerful tool for wafer fabrication. Its flexibility, accuracy, and high throughput make it ideal for use in semiconductor production and lithography. With its high-end features and reliable performance, this tool can significantly boost productivity and dramatically reduce production costs.