Used AXCELIS / FUSION M 200 PCU #9314155 for sale

ID: 9314155
Wafer Size: 8"
UV Stabilizer / Bake system, 8" Chamber SMIF.
AXCELIS / FUSION M 200 PCU is a top-of-the-line exposure equipment designed to streamline movements and automate processes within wafer processing. This system features an Advanced Exposure Module (AEM) able to maintain tighter overlay control than competing systems. This advanced technology can sensitively scan patterns, precisely altering the size and shape of generated patterns. The unit also features a three-axis stage for enhanced precision during exposure. The machine contains an Image scanning technology that provides detailed images of wafers that are used to rapidly detect patterns across multiple chips. This technology can also detect defects with high accuracy, ensuring high yields without sacrificing overall productivity. The tool also includes a cutting-edge Dual Jet Focused Ion Beam (DJ-FIB) that offers high-precision pattern positioning with fast repeatability. FUSION M200PCU also features high-end automation that provides unparalleled speed and efficiency. The asset is able to perform various types of exposures, including resist, chrome, and gold. The model can also incorporate state-of-the-art automation to streamline process times, significantly reducing labor costs and freeing up personnel to focus on other tasks. Finally, AXCELIS M200 PCU offers improved contamination control. Through its anaerobic process isolation, the equipment blocks out contaminants and particle buildups that can impact overall wafer performance. This system also incorporates comprehensive ion scrubbing for the complete removal of contaminants. In conclusion, FUSION M 200 PCU offers advanced automation, precise movement, and superior contamination control. Its cutting-edge imaging technology makes the unit ideal for fast-paced wafer processing operations, providing detailed analysis and consistent results. With its enhanced overlay control, precision pattern positioning, and improved process times, this machine is an innovative solution for improving wafer processing efficiency.
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