Used AXCELIS / FUSION M150PC MicroLite #9162462 for sale
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ID: 9162462
Photostabilizer
Equipped with:
M150PC Irradiator
M150PC Chuck
(2) Wafer handling stations
M150PC Indexer
M150PC Transporter
EMO Power box
Power supply: P104
Processor / Memory / Interface cards missing:
CPU card
(2) Wafer Handler interface cards
System interface card
Chuck interface card
Human interface card
Power supply interface card
Includes:
Photostabilizer operation
Maintenance manual
Power:
Voltage: 208 Volts
Frequency: 60 Hertz
Phase: 3
Current: 21 Amps.
AXCELIS / FUSION M150PC MicroLite exposure equipment is a high-performance lithography option designed to meet the most challenging production requirements. This system provides a highly efficient, cost-effective solution for production lithography. The unit's advanced design and construction, utilizing PascivalinesTM/DEC SeriaTM optics, offers superior performance, accuracy, and resolution and enables effective production of next generation semiconductor structures with unprecedented speed and accuracy. Additionally, proprietary air bearing spindles ensure highly accurate wafer handling and alignment, while SCSI control enables tight process control. FUSION M150PC MicroLite's small form factor allows for flexibility in production set-up and integration. Its light weight and small footprint make it ideal for both drum and queue setups in lithography suites and general production environments. Furthermore, its superior motion mechanics enable a wide range of wavelengths and power levels, resulting in high-quality images and low levels of distortion. AXCELIS M150PC MicroLite offers a unique combination of high performance, advanced optics and outstanding accuracy. Its easy-to-use controls allow for quick and efficient operation, with no downtime due to labor-intensive cleaning cycles. In addition, its integrated microprocessor-controlled machine monitoring and fault-detection software ensure maximum uptime and accurate, repeatable results. M150PC MicroLite's advanced laser-driven, direct-drive design makes it ideal for volume production applications. Utilizing a modular, high-efficiency, low-power optical design, it enables a high degree of accuracy during lithography processes. It also provides low particle generation and an exceptionally small spot size for high-resolution exposure. AXCELIS / FUSION M150PC MicroLite's open-architecture software enables integration with a variety of test and analysis systems. This corresponds to increased productivity and accuracy of your lithography processes. Additionally, its enhanced operating program gives users the ability to access, store, and operate image analysis software, such as SEM or LDI. Overall, FUSION M150PC MicroLite is an efficient and reliable choice for advanced production lithography. Highly optimized and cost-effective, it provides precision and accuracy for a wide range of lithography processes. Its advanced features make it an essential part of most lithography suites.
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