Used AXCELIS / FUSION Microlite 200 PCU #9095471 for sale

AXCELIS / FUSION Microlite 200 PCU is a sophisticated exposure equipment designed to facilitate the manipulation and manufacture of semiconductor devices. The system utilizes a customizable reticle stage that supports multiple reticles with varying substrate materials, and provides repeatable performance for positioning and alignment. The scan control is optimized for low noise operation and has the ability to operate in a variety of scan rates. FUSION Microlite 200 PCU offers dual-beam alignment, which provides a high level of accuracy during alignment and reduces alignment time. The key features of the unit include precise numerical aperture adjustment, a stepper motor and gear head motor for focusing and positioning, and dynamic optimization of scan rate and optical stabilitization. The photomask alignment is driven by a real-time focusing machine, which is built-in with a computer-controlled, servo-driven reticle stage. It utilizes two independent optical engines, which provide high-accuracy and precision during the alignment process. The tool is capable of precise registration of features, even at a scan speed of over 1000 cycles per second. The Photomask Changer is a fully automated asset, which can quickly index and switch between the different photomask sets. AXCELIS Microlite 200 PCU features a Multi-Position Fringe Sensor (MPS) with 4 sensor heads. This adds a level of precision to the alignment process by allowing for fine alignment of the reticle with the overlay grid pattern. It also allows for the alignment of several features at the same time, which further increases throughput and productivity. The Reticle Selection Unit (RSU) provides accurate, low-noise reticle alignment, and the stepper motor and gear head motor provide precise focusing and positioning. In addition, the AXCESMicrolite 200 PCU features an effective cooling solution, which gives the model the ability to handle different substrates and materials. A remote monitoring equipment is also provided, allowing for efficient data collection without manual intervention. The system also allows for quick setup with multiple modules that can easily be installed. In conclusion, AXCELIS / FUSION Microlite 200 PCU is an advanced exposure unit that offers a variety of features designed to make the semiconductor fabrication process more efficient and accurate. The machine offers dual-beam alignment, precise numerical aperture adjustment, MPS sensors for precise alignment, and a Multi-Position Fringe Sensor (MPS) for finely detailed and accurate alignment of overlay grid pattern. The tool also features an effective cooling solution for handling different substrates and materials. The asset is also equipped with a host of automation features that increase productivity, reduce alignment time, and provide efficient data collection.