Used AXCELIS / FUSION PS3 #293742986 for sale

AXCELIS / FUSION PS3 exposure equipment is an advanced photolithography machine designed for advanced semiconductor processing. Utilizing a reliable ion source, FUSION PS3 delivers highly accurate and consistent exposures of device features in various substrate materials and design geometries. Supporting both photoresist and non-photoresist processes, the system offers improved feature resolution and consistency over traditional lithography processes. The platform features a 10 micron resolution linear scanner, with a maximum speed of up to 2000 lines/second. A large field of view and fast scanning speed enable rapid device pattern transfer while producing superior feature detail. Additionally, AXCELIS PS 3 delivers enhanced throughput through its highly flexible, configurable platform design. Its robotic cassette loader optimizes multiple-device production, while an automated exposure control unit adjusts exposure times accordingly to ensure continuous repeatability and high uniformity. PS3's precision optical transport machine allows for accurate focus across the entire substrate surface for high aspect ratios and increased uniformity. Its active control tool mitigates any optical alignment and distortion issues, allowing for highly accurate processing results. The platform's high-sensitivity, high-precision photomask alignment and measurement technology also enables it to process even complex device features. Featuring an effective alignment tolerance of 10nm, a high signal-to-noise ratio and a low sub-resolution alignment signal, the asset accurately transfers minute feature information. Overall, AXCELIS PS3 delivers advanced device processing capabilities for high-volume and advanced semiconductor production. With the ability to accurately print small features and patterns, the model ensures high precision and repeatability, leading to high product yields. It is highly flexible, configurable and accurate, making it a powerful platform for advanced device processing.