Used AXCELIS / FUSION PS3 #9228099 for sale

AXCELIS / FUSION PS3 is an advanced exposure equipment used for photolithography processes in the semiconductor industry. FUSION PS3 system is a cutting-edge unit that improves on traditional DUV photolithography capabilities by providing higher resolution, better reproducibility, and faster throughput. AXCELIS PS 3 features a comprehensive suite of features designed to enhance the end results of photolithography processes. The machine utilizes a variety of tool configurations to enable precise layer-to-layer alignment and multi-field, multi-field-type wafer scanning capability. PS3's high-speed, high-resolution scan and output capabilities can produce wafers up to 500 x 500 mm field size with 0.17 μm resolution. In addition, AXCELIS PS3 supports a wide range of sensitive wafer substrates for the most advanced processes. The tool's digital substrate tilt compensation feature enables fast and accurate wafer imaging while the advanced wafer tracking and exposure control systems ensure consistent wafer alignment. AXCELIS / FUSION PS 3's advanced processing systems offer various choices for materials, resist, scan speed, shot reduction, and etch enhancement. Tool selections and combinations of hardware and software can be tailored depending on process requirements. FUSION PS 3's wafer loading asset offers increased flexibility to support high throughput needs. Additionally, a variety of high precision optics packages are available to give customers the highest processing accuracy. PS 3 model is covered by a comprehensive suite of service and support programs to ensure the continuity of the customer's processes. Preventive maintenance, equipment repairs, spare parts delivery, and technical training are all part of the total service package. In addition, FUSION provides quick resolution to customer inquiries. Overall, AXCELIS / FUSION PS3 advanced exposure system is an excellent tool for photolithography processing applications. Combining the highest performance capabilities with the latest technology, FUSION PS3 provides the most advanced and reliable photolithography solutions.