Used AXCELIS / FUSION PS3 #9240661 for sale

AXCELIS / FUSION PS3 is an exposure equipment that helps manufacturers produce advanced photographic and printed devices, like printed circuit boards, flat panel displays and biosensors. FUSION PS3 is a state-of-the-art photolithography system that offers high-quality patterning for the development of integrated circuit (IC) chips. It combines advanced optical, mechanical and electronic hardware, along with sophisticated software tools for patterning and metrology. At its core, AXCELIS PS 3 features a top and bottom large-area exposure unit with a Eucentric point, powered by a true 193 nm, 13 cm-diameter ArF lithography laser. This offers superior depth of focus and resolution capability, and the top and bottom mask plate handlers, offering a 19.75-inch-by-19.75-inch format and scanning rates of up to 40 inches per second, along with a higher throughput of 10 wafers per hour that can decrease manufacturing cycle times. AXCELIS / FUSION PS 3 also features substrate motion control and image-focus adjustment systems, so that exposure can be precisely and accurately achieved. This enables users to pattern highly integrated ICs with fine resolution, high throughput and excellent overlay accuracy. It also enables them to take advantage of advanced optical functions like true polarization and variable exposure capabilities for the development of the most advanced IC products. In addition, FUSION PS 3 features a precision patterning process control for precise lithography, even at low exposures, as well as a powerful software suite that allows users to quickly program and process intricate patterns and precise results. A suite of metrology tools, including pre- and post-exposure alignment, are also available for consistent results. Finally, PS 3 offers an enhanced environmental control machine that ensures the tool's accurate operation, with less impact on air pollutants and improved power efficiency. This integrated environmental control includes an energy saver mode that reduces power consumption, and a low general power exhaust button that can reduce harmful emissions. AXCELIS PS3 is a powerful and reliable photolithography asset that provides advanced exposure capability to help produce tomorrow's IC devices. It combines advanced hardware and software to offer precise patterning and metrology capabilities, with improved throughput and environmental control features.