Used AXCELIS / FUSION PS3 #9241236 for sale

AXCELIS / FUSION PS3
ID: 9241236
Wafer Size: 12"
Vintage: 2004
UV Cure system, 12" 2004 vintage.
AXCELIS / FUSION PS3 is a state-of-the-art exposure equipment designed for advanced mask production and lithography patterning. The system combines high precision optics, an impeccable imaging unit, and advanced software control to deliver ultra-precise, high-resolution results. FUSION PS3 is an advanced optical imaging machine that leverages an integrated optical tool, comprised of a broadband arc lamp, and optionally an aspheric ultra-violet i-line lens, to deliver precision imaging results. The combination of high resolution optics and software control allows the asset to precisely define patterns into a wafer. The model also features an automated wafer alignment equipment, allowing for automatic alignment and registration of wafers and precise pattern placement. AXCELIS PS 3 utilizes advanced software control methods to help optimize speed and accuracy during production. The automated wafer alignment feature is managed by an advanced software package which allows for accurate location of components at each step of the process. Additionally the system is capable of on-the-fly adjustments for ultra-precise pattern placement and focus control. The software also allows the operator to take full advantage of the unit's imaging capabilities to optimize throughput and maximize yield. PS3 machine also incorporates an advanced scanner tool, which combines a precision XY stage with a motorized Z-axis scanahead. This combination of a motion stage and advanced imaging asset allows for ultra-precise performance and accuracy. The model also provides feedback on imaging performance, and on-board scan diagnostics to verify optimal settings and parameters. In addition, AXCELIS PS3 features an intense level of inspections capabilities. This includes image comparison, defects analysis, overlay performance, and spectral response analysis. This allows the equipment to deliver consistent yields and reliable process control. PS 3 is a state-of-the-art exposure system designed to deliver outstanding imaging capabilities, reliability, and process control performance. Utilizing advanced optics, imaging systems, and software control measures, the unit is perfect for the next generation of mask production and lithography patterning. With its precision optics, automated wafer alignment machine, motorized scanning head, and ultra-precise imaging capabilities, AXCELIS / FUSION PS 3 delivers the performance and accuracy that mask production and lithography need.
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