Used AXCELIS / FUSION PS3 #9241297 for sale

AXCELIS / FUSION PS3 is an exposure equipment designed for use in the photolithography process for the fabrication of semiconductor devices. It is capable of exposing features as small as 0.25 microns and up to one inch in diameter. The fused FUSION PS3 system comprises a powerful host computer that controls the operation of the machine, as well as an UltraViolet (UV) light source and precision stages. The light source for the exposure unit is an arc lamp that emits UV light. The machine features high-speed scanning, a precise UV sensor for measuring the intensity of the light source, and precise control over the positioning of the movable stages for accurate alignment of the mask and the wafer being exposed. The tool has a maximum scanning speed of 30ms per cycle and a Z-stepper accuracy of 0.3 microns. The feature set of AXCELIS PS 3 allows for rapid and accurate manufacture of semiconductor devices. With its integrated precise stage positioning, and a range of operation modes, users can dial in the exact parameters required to maintain high throughput while ensuring feature fidelity. The exposure asset features full process control, with feedback from the wafer via an internal quality control model, that allows for tight control over the entire manufacturing process. The equipment is configurable to automate a variety of unique processes such as a wafer being exposed with two or more different masks. AXCELIS / FUSION PS 3 exposure system is designed for use in a wide variety of photolithography processes in the manufacture of semiconductor devices. Its powerful host computer allows for precise control over the overall process, while its high-speed scanning, precise UV sensor, and ultra-accurate stage positioners allow for rapid and accurate device manufacture.