Used AXCELIS / FUSION RapidCure 320FC #9273833 for sale

AXCELIS / FUSION RapidCure 320FC is a next-generation, top-of-the-line exposure equipment designed to facilitate the development of advanced semiconductor processes. The system features a 320mm diameter, variable-speed wafer chuck and a high-precision wafer alignment unit, enabling production of very fine designs without the need for complex and costly post-processing procedures. Equipped with a deep-UV laser source from the Xpress family (or the FusionHead) and a unique illuminator design accommodating both custom aspheric lenses and slit illumination, FUSION RapidCure 320FC is the perfect tool for the development of process nodes under 20nm in size. Its high-accuracy wafer alignment machine ensures that even very small features align correctly. The RapidCure provides excellent exposure uniformity across the entire surface, with variance of less than 1% in exposure time and dose. The tool uses two filters, allowing different solutions depending on the process requirement, and its highly-accurate dose control ensures up-to-date results for each processing step. AXCELIS RapidCure 320FC also features an advanced input/output digital I/O for controlling focus height, further allowing for intricate, repeated stepper motion profiles in combination with imaging. The asset simultaneously integrates a static plasma source and a precisely-controlled gate valve for a uniform chamber environment. The rapid curing process ensures that the photoresist set is completed with consistent every time, prolonging the service life of the wafers and masks used in the process. The integrated cooling model ensures low thermal fluctuations and high power prolonged-use stability. Finally, RapidCure 320FC is capable of process simulations and OPC calibration with its advanced interface capabilities and support for various exposure tool vendors. With a combination of automated recipes, Live Exposure Process Verification and advanced reporting tools, RapidCure provides the latest in process development capabilities.