Used AXCELIS / FUSION Summit XT #293627840 for sale

AXCELIS / FUSION Summit XT is an advanced exposure equipment designed for lithography. It is ideal for applications such as advanced memory and logic integrated circuit manufacturing and other high-precision lithography processes. The system is designed for maximum efficiency and flexibility, allowing the user to optimize their processes for the specific device or platform. The unit features a multichannel, top-of-the-line, 4kWxtal optics product. This enables advanced performance across multiple wavelengths and polarization angles. The machine also features total scan control and advanced auto-exposure control, allowing for accurate and precise control over wafer cross-sections and exposures. The tool also has automated alignment and source calibration capabilities and is integrated with process control software that allows for optimized asset performance and increased throughput times. FUSION Summit XT is an integrated model, featuring a patented air-bearing stage and automated load port. This provides a high-precision and smooth stage operation, along with high throughput and repeatability. The equipment also features multiple substrate configurations, including up to eight substrates per chamber, two active substrates and up to 128 steps per exposure and +-15 wafer edge bias. This enables it to effectively address a wide range of user requirements, from single layer to multi-layer processing applications. AXCELIS Summit XT comes complete with a comprehensive software package providing a full range of features and operation. This includes a host of security features, including comprehensive process control, system maintenance, and data management. As part of this package, the unit includes an array of advanced tools to simplify and streamline the operation of the machine. These include simple substrate programming and calibration, quick setup and access to job data, complete wafer data storage with line-by-line mapping, automated process tracking and control, and more. Overall, Summit XT advanced exposure tool offers superior performance and capability for both prototyping and production processing needs. With advanced optics and integrated software, the asset allows users to customize their processes to their desired end-uses. Additionally, its comprehensive security features ensure that data is protected and user processes optimized for maximum efficiency.