Used AXCELIS / FUSION Summit XT #9189027 for sale

AXCELIS / FUSION Summit XT is an advance exposure equipment designed for commercial lithography processes used in semiconductor manufacturing. It is a fully automated, 3-axis system driven by precision motor actuators optimized for imaging throughput and high-accuracy layer definition. It features an advanced optical unit with both a 100-watt laser-illuminated projection device and a motorized mask aligner that is capable of handling both high and low-volume production. FUSION Summit XT is designed to maximize high-volume crystalline photolithography processes through the utilization of advanced optics. Its modular architecture allows for its integration into existing production infrastructures with a wide range of exposure modes. The machine is equipped with sophisticated software-control systems that optimize tool performance and ensure reliable, consistent operation. It can be used to produce very complex patterns with high precision and accuracy. AXCELIS Summit XT's optical asset enables it to expose both positive and negative exposure layers while varying the exposure area from a minimum of 0.1 um to a maximum of 50 um. Its projection imaging enables it to capture high resolution images, allowing for a higher-quality image transfer from photomask to wafer, reducing printed cycle times. In addition, its modular and customized hardware, combined with automated process capability, enable multiple wafer processes in the same run, maximizing production efficiency. This feature allows the processes for different layers of the wafer to be pre-programmed and automated without operator intervention or reprogramming. Summit XT's integrated software platform includes process control and performance optimization tools such as process control, effective dose mapping, wafer alignment, focus control, barcode recognition, script editing, image capture, and more. This software interfaces with a wide range of associated external lithography tools to optimize model performance and manufactured yield. AXCELIS / FUSION Summit XT also includes a wide range of safety features to protect personnel and the equipment as well as an advanced environmental control system to ensure superior imaging conditions. The unit can be tailored to meet a variety of customer needs and is backed by global service and support. In summary, FUSION Summit XT is an advanced and automated exposure machine that is well-suited for high-volume product manufacturing processes. It features an advanced optical tool, customizable to meet specific industrial needs, and robust software platform. This asset is designed to optimize process performance and manufactured yield while ensuring personnel safety and environmental control.