Used AXCELIS / FUSION Summit XT #9352620 for sale

AXCELIS / FUSION Summit XT is a comprehensive and robust exposure equipment designed to provide extremely precise and accurate photomask making capabilities. FUSION Summit XT is capable of exposing a wide range of photomasks using a variety of media and wavelengths from 248nm (KrF) to 405nm (UV). It is capable of processing a variety of media ranging from quartz to glass to metal. The system features a six-sided, fully-enclosed, and vibration-isolated environment to ensure the highest quality and accuracy in exposed photomasks. Its high-speed processing capabilities make it suitable for the most demanding photomask applications. A patented wafer and photomask scanning unit allows for, extraordinarily uniform exposure across the photomask, reducing the need for costly and energy-intensive re-alignments. AXCELIS Summit XT supports a range of precision photomask inspection systems, including visual inspection systems, microscopes, and laser measurement systems. This allows for detailed examinatio of photomask edges and other critical features that may affect the accuracy of the exposure process. Additionally, a suite of exposure metrology tools is available for monitoring changes in exposure and verify machine performance. Summit XT has been designed to handle very high resolution patterns and supports exposure with a high degree of precision. Its industry-leading alignment accuracy results in exceptional overlay performance and can improve the yield of photomask manufacturing processes. The tool supports a wide variety of resolution formats including sub-micron performance, and its high exposure uniformity can improve productivity and reduce scrap and rework costs. AXCELIS / FUSION Summit XT offers a variety of configurations to meet the needs of any photomask application. Its flexibility is designed to benefit customers who need to rapidly adjust their processes to meet changing market and process requirements. FUSION Summit XT is supported by an extensive remote service network to ensure peak performance. The asset also features the industry's most comprehensive maintenance and diagnostic capabilities, allowing access to critical model information from any location for faster and more efficient diagnostics and response. The equipment is easy to use and its intuitive graphical user interface allows the user to quickly access features and functions. Additionally, a wide variety of options and upgrades are available to assist customers in customizing AXCELIS Summit XT to their precise needs.