Used AXCELIS / FUSION UV LC-6B #9061093 for sale

AXCELIS / FUSION UV LC-6B is a state-of-the-art, full-featured exposure equipment from FUSION. The system was designed to provide precision ultraviolet (UV) lithography exposure to maximize throughput and yield. This unit is especially well suited for mid- to high-volume production environments as it is highly modular and scalable. FUSION UV LC-6B features an advanced setup and alignment option, providing superior reduction and accuracy of mask-to-wafer alignment. This ensures precise exposure coordinates and ensures higher yield rates. The machine is highly automated, allowing for minimal operator involvement, and is equipped with a precision stage drive for precise exposure placement. The chamber size is customizable and can accommodate substrates up to a 200mm diameter. The tool provides advanced optical performance for precise exposure control. Its UV adjustable aperture ensures uniform illumination intensity and reproducible results. The highly advanced reflector technology promotes excellent snap-in convenience, eliminates misalignment and reduces change-over times. The advanced beam scanning head and auto-refocus optics reduce focal depth of field variability and minimizeSetup optimization. AXCELIS UV LC-6B is capable of reaching exposure doses up to 25 mJ/cm2, ensuring excellent resolution. The asset's advanced batch-mode processing is well-suited for large throughput situations, and can be custom configured to accommodate different substrate or exposure dose requirements. An advanced in-line process control ensures maximum wafer-to-wafer repeatability, while the patented noncontact substrate and intermediate holders prevent contamination. UV LC-6B is designed to work with a variety of automation libraries, including the MultiFab and Temptronic NxStep libraries. It is a dependable, cost-effective solution for patterning and can be relied upon for consistent results. With its advanced imaging technology and powerful model software, AXCELIS / FUSION UV LC-6B is an ideal exposure solution for mid- to high- volume production.