Used DRC UV-M10 #293642351 for sale
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DRC UV-M10 is a powerful exposure equipment designed for high performance in the production of semiconductor and thin-film devices. The system is highly automated and integrates three key steps of a photolithography processing workflow: substrate loading, exposure, and post-exposure bake. The integrated workflow results in an efficient and cost-effective device manufacturing process. UV-M10 features a large-area circular alignment unit with two table arms that enable an efficient substrate loading and unloading. It is capable of handling both manual and automated production, with a wide range of alignment accuracy depending on the size of the substrate and the type of device being produced. Additionally, the machine is designed to be easily configurable and highly customizable according to customer requirements. The exposure tool is equipped with an advanced ultra-high resolution projection asset. The model delivers up to 40 mJ/cm² of actinic UV energy with a throughput of up to 1400 wafers per hour. It also features a light-shielding equipment that guarantees an even exposure of the substrate to the actinic UV radiation, resulting in a uniform pattern size and high homogeneity of the final device. DRC UV-M10 provides a wide range of post-exposure bake (PEB) capabilities, including temperature control, rapid cooling and drying, and semi-automated sample handling. It is designed to ensure optimal results in terms of device performance and yield, while minimizing the time and energy needed for production. Furthermore, the system is provided with a comprehensive set of software tools that enable users to adjust the exposure parameters and substrate temperature according to their devices' production requirements. This ensures a reliable manufacturing process, while taking into account the complexity of the devices being produced. The software is also designed to address various safety and environmental aspects, such as UV radiation levels, as well as any potential pollution issues associated with the manufacturing process. UV-M10 is a powerful and efficient exposure unit that provides an ideal solution for the production of semiconductor and thin-film devices. Its automated workflow and advanced features enable manufacturers to quickly and reliably produce high-performance devices in a cost-effective manner.
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