Used FUSION G03 #9196371 for sale

FUSION G03 is an advanced exposure equipment designed for semi-conductor aligners and steppers. It features an auto-focusing 2D alignment measurement system for enhanced precision, as well as high-precision laser alignment and reticle clamping for excellent uniformity. The exposure unit is equipped with a state-of-the-art auto-leveling machine, which provides quick, precise and accurate leveling across the exposure area, while also providing superior overlay performance. The exposure tool is capable of exposing up to 24" device-level devices and has a high-resolution pattern generator, which allows for patterns of up to 21µm and is capable of 4-way exposure. The asset has a high-performance LED fuser, which provides excellent brightness and contrast with variation ranges of up to 0.4µm and is also capable of reducing exposure variations. The model is also equipped with a high-precision three-dimensional scanner to ensure accurate alignment across multiple aligners, as well as a variety of control functions such as high-accuracy alignment fault recognition and overlay matching. Furthermore, the equipment is designed to be fully automated both for device and reticle handling. It is also compatible with a variety of reticle types, such as bump reticles, and equipped with a high-resolution reticle clamp. The system also features an advanced metrology platform with a variety of metrology functions, including scanning electron microscope (SEM), atomic force microscope (AFM) inspection, and optical inspection. The metrology functions are designed to ensure outstanding pattern uniformity and reproducibility for superior performance. Overall, G03 is a high-performance, advanced exposure unit designed for precision semiconductor alignment and exposure. Its features make it an ideal choice for production lines and other high-volume semiconductor fabrication applications.