Used LG PRI SAES5031 #9301073 for sale

LG PRI SAES5031
Manufacturer
LG PRI
Model
SAES5031
ID: 9301073
Vintage: 2005
Exposure system 2005 vintage.
LG PRI SAES5031 is a state-of-the-art exposure equipment designed to deliver UV light for the production of superior-quality photoresists. The system combines advanced in-house optics and a scan speed of up to 2,000 mm/sec for maximum throughput and minimal maintenance needs. The unit is comprised of a UV light source, a shutter assembly, and a high-resolution X-Y movement robot. The light source is built with two in-house optics and a maximum output of 4,800 mW/cm2; it is able to accurately deliver UV light at multiple pre-set wavelengths and exposure times. The shutter assembly is designed with fail-safe features, providing adjustable interval lengths for exceptional performance and accuracy. The movement robot uses ultra-low friction bearings and a high-precision closed-loop control machine for precise stability and positional accuracy. SAES5031 can accommodate up to six different photoresists, making it suitable for high-yield production and optimization. Its advanced shutter control capabilities are combined with a programmable exposure count, giving it the capability to automatically start, stop and repeat exposures, as well as switch photoresist layers. It also features built-in vacuum clamping to ensure accurate positioning throughout the exposure process. For added safety, LG PRI SAES5031 is designed with fail-safe lens protection, which prevents exposure to hazardous UV light. Finally, the tool contains an intuitive graphical user interface that allows users to monitor and adjust exposure settings with ease. SAES5031 is an ideal tool for applied photolithography and offers reliable, repeatable performance for mass production without sacrificing industrial safety requirements.
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