Used NIKON FX-21S #9285711 for sale

NIKON FX-21S
Manufacturer
NIKON
Model
FX-21S
ID: 9285711
Exposure systems Substrate size: 680 mm x 880 mm.
NIKON FX-21S is an advanced exposure equipment designed for the highest precision lithographic production. It features an integrated multi-zone symmetrical exposure head, which is capable of uniformly exposing large substrates, with an automatic documentation system for recording the exposure setup and results. The exposure unit is provided with two parametric light sources: a 200W xenon arc lamp and a 300W metal halide lamp for uniform, linear stimulation and a reflector with modular optics for three different exposure zones. The xenon source is used to provide the most consistent and uniform light and the metal halide lamp provides a more focused intensity for small areas. This combination of light sources provides precise exposure of each of the different zones, thus assuring accurate reproduction of photomasks. The optical parts of the machine are made of high-precision silica glass and are completely temperature and humidity passive. Additionally, they are designed for long-term reproducibility and a minimum of thermal noise. The optical parts are mounted on a high-performance double axis traverse platform for precise and accurate exposure registration and control. The exposure head is integrated with two laser micrometers for the alignment of the substrate and compensation of the environment variables. The laser micrometers are also used for the controllable exposure of very small portions of the photoresist. The micrometers are adjustable in five parameters, allowing for precise exposure of the photoresists for different processes. For registration accuracy and data analysis, FX-21S also offers an advanced automatic documentation tool that records different setup parameters such as exposure time, exposure area, type and duration of light source, etc. All data is systematised and stored in easy-to-retrieve formats and can be outputed in different formats. This asset provides for a complete traceability of the results, ensuring accurate and repeatable exposure results. Furthermore, NIKON FX-21S is provided with an intuitive user interface and advanced software that allows for easy control of the exposure process, as well as reading and recording the outputted data. The interface is provided with several different languages, so that it can be used in different parts of the world. It also offers built-in safety features to protect the user in case of unexpected events, such as a power failure. To conclude, FX-21S is a highly precise and reliable exposure model, designed for high-precision lithographic production. It is equipped with automated registration and calibration systems to ensure accurate exposures with consistent results. It is designed to offer the highest accuracy and safety, while providing an easy-to-use graphical user interface.
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