Used NITTO UM 810 #9150884 for sale
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NITTO UM-810 Exposure Equipment is a state-of-the-art photolithography tool used in the fabrication of integrated circuits. This system uses an argon fluoride (ArF) excimer laser with a wavelength of 193nm to generate extremely small patterns and features on semiconductor substrates. The unit consists of two components: the advanced exposure optics and the manipulator robot. The advanced optics is comprised of an energy source - the excimer laser - which is optically amplified to deliver 15mJ/pulse. This is coupled with a precision mask aligner and optical image projection machine that together create extremely small features on the wafer of just 0.25μm line widths or less. The optics include a "pinset" for pixel-level control of alignment accuracy and overlay. Not only does this allow chipmakers to accurately project the mask pattern onto the wafer, but also removes mask misalignments and other aberrations. The robot takes care of positioning and alignment of the wafer, with a force controlled alignment tool for improved accuracy. The robot is a fully autonomous 4-axis asset, able to move with a positional accuracy of 0.5 μm, allowing it to accurately retarget, or align, the substrate onto the mask. The robot's high-resolution sensors enable it to detect and correct alignment errors, and at the same time, reduce edge placement errors to 1 μm or better. These features and components make UM-810 Exposure Model an efficient and precise tool for integrated circuit manufacturing. Working with a wavelength of 193nm, the equipment is able to create extremely small features on the semiconductor material, while also providing superior reliability and accuracy through the robot's very precise and tight tolerance control. The system further allows chipmakers to easily adjust the overlay of mask patterns - the cornerstone for creating complex and very small patterns - with its "pin set" that allows pixel-level control of alignment accuracy and overlay. This leads to improved yields and cost effectiveness, thus making NITTO UM-810 Exposure Unit an invaluable tool in the modern integrated circuit manufacturing process.
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