Used USHIO UFX-2259B-AMB01 #9372133 for sale
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ID: 9372133
Vintage: 2009
Exposure system, parts machine
Shutter unit:
Exposure area, P/N; 2317-3246
Mask light source
Optical parts:
Light collecting mirror, P/N: 2306-3208
Plane mirror, P/N: 2836-7583
Projection lens, P/N: UPL-59EX
Microscope, P/N: 1000051733 / 3185-0361
CCD Has been removed
Workpiece stage:
Beam splitters, P/N: 1000049959 (43.5)
Beam splitter, P/N: 1000029070 (11.5)
Motor unit (X, Y, Θ), P/N: 3026-0870
Work stage units:
Drive shaft pressure wheel unit
Drive shaft unit
Brake shaft unit
Clamp unit
Vacuum suction plate
Anti-uplifting press wheel group
Illumination / Microscope: Light cover light source gate missing
Micrometer (Precision sliding table), P/N: MHS2-13
OMROM Rotary encoder, P/N: E6B2-CWZ6C (2000P/R)
Reel receiving and discharging mechanism:
AC Motor, P/N: VHR206AGVJ / GV2G250
AC Motor, P/N: 2TK3GN-AGN25K
Clutch, P/N: AMC-40
(6) Drive / Brake units:
MATSUSHITA AC Servo motor (Drive unit), P/N: MSM5AZP1A
MATSUSHITA Motor driver (Drive unit ), P/N: MSD5A1P1EA
Clutch, P/N: AMC-5
Piping units:
SMC Solenoid valve workpiece blow, P/N: VCW31-5G-2-02-V-B-X41
SMC Solenoid valve workpiece vacuum, P/N: VP542R-5GZ-03A-F
SMC Solenoid valve workpiece vacuum, P/N: VCW41-5G-4-02-V-B-X27
SMC Solenoid valve workpiece vacuum, P/N: VCW3134V-02-5GS-B
PCB:
USHIO Auto micrometer, P/N: PB-1026B
USHIO Rotary encoder I / F, P/N: HC ENC I/F
NDG Switcher, P/N: PB-1028B-U00
Video IN, P/N: RICE-001
Video OUT, P/N: PLUM-001
MELEC Motor control, P/N: C-864V1
Screen / Peripheral:
KEYENCE VT-7S Touch panel display is non-functional
Mouse for visual teaching
PLC:
MITSUBISHI CPU Unit, P/N: Q06HCPU
MITSUBISHI Serial data unit, P/N: QJ71C24-R2
MITSUBISHI 64-Point IN unit, P/N: QX40
MITSUBISHI 65-Point OUT unit, P/N: QY50
MITSUBISHI 2-Axis positioning unit, P/N: QD75D2
MITSUBISHI High speed counter, P/N: QD62D
MITSUBISHI Memory card, P/N: Q2MEM-8MBA
MITSUBISHI QJC1724N
MITSUBISHI QJ61BT11N
Internal wiring; Sensor line / Communication line
PC Host: AUPC
Air mount: (3) Balance air cushions
Static elimination: Ion gun
2009 vintage.
USHIO UFX-2259B-AMB01 is an advanced exposure equipment designed for optical lithography applications. The system offers a high-precision and high-stability exposure process, which is critical for ensuring the accuracy of printed features. It is capable of accurately controlling the shape, size, depth and other microstructure features of the printing elements. The unit comes with a variety of lenses and apertures to adapt to different processes and materials. It is equipped with a high-precision stage to move the wafer to ensure accurate placement of printed features. The exposed wafer is then transferred from the machine to the processing platform for further processing. UFX-2259B-AMB01 allows precise control of the exposure process through an accompanying software package. This software is capable of managing exposure time and power, as well as controlling the various parameters, such as focus and wavelength. It also allows users to monitor temperature, humidity, and air flow during the exposure process. USHIO UFX-2259B-AMB01 also has an advanced computer digital signal processor (C-DSP) to provide consistent accuracy of exposure parameters and a constant temperature within the exposure chamber. The advanced processor also provides diagnostic capabilities and allows remote monitoring of tool performance. The asset is capable of accurately calibrating exposure parameters to ensure process accuracy. It can also evaluate wafer feature shapes to quickly identify potential problems with the printing process. UFX-2259B-AMB01 provides users with detailed exposure log data that can be used for reporting and analysis. The model is equipped with many safety features to monitor different parameters and prevent incorrect process operation. These include a halogen bulb guard and anti-static grounding for the wafer peripheral chucks. The exposure equipment also has a shock absorber system in order to maintain optimal exposure performance in extreme scenarios. Overall, USHIO UFX-2259B-AMB01 is an advanced exposure unit designed for optical lithography applications. It is capable of accurately controlling the shape, size, depth and other microstructure features of the printed elements, as well as providing users with detailed exposure log data for reporting and analysis. The machine also offers numerous safety and performance features to ensure optimum performance.
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