Used USHIO UFX-2259B-AMB01 #9375525 for sale

  • Photo Used USHIO UFX-2259B-AMB01 For Sale
  • Photo Used USHIO UFX-2259B-AMB01 For Sale
Photo Used USHIO UFX-2259B-AMB01 For Sale
Loading
Photo Used USHIO UFX-2259B-AMB01 For Sale
Loading
Exposure Systems
Manufacturer
USHIO
Model
UFX-2259B-AMB01
ID: 9375525
Vintage: 2009
Exposure system Shutter unit: Exposure area, P/N; 2317-3246 Mask light source Optical parts: Light collecting mirror, P/N: 2306-3208 Plane mirror, P/N: 2836-7583 Projection lens, P/N: UPL-59EX Microscope, P/N: 1000051733 / 3185-0361 Workpiece stage: Beam splitters, P/N: 1000049959 (43.5) Beam splitter, P/N: 1000029070 (11.5) Motor unit (X, Y, Θ), P/N: 3026-0870 Work stage units: Drive shaft pressure wheel unit Drive shaft unit Brake shaft unit Clamp unit Vacuum suction plate Anti-uplifting press wheel group Illumination / Microscope: Light cover light source gate Micrometer (Precision sliding table), P/N: MHS2-13 OMROM Rotary encoder, P/N: E6B2-CWZ6C (2000P/R) Reel receiving and discharging mechanism: AC Motor, P/N: VHR206AGVJ / GV2G250 AC Motor, P/N: 2TK3GN-AGN25K Clutch, P/N: AMC-40 (6) Drive / Brake units: MATSUSHITA AC Servo motor (Drive unit), P/N: MSM5AZP1A MATSUSHITA Motor driver (Drive unit), P/N: MSD5A1P1EA Clutch, P/N: AMC-5 Piping units: SMC Solenoid valve workpiece blow, P/N: VCW31-5G-2-02-V-B-X41 SMC Solenoid valve workpiece vacuum, P/N: VP542R-5GZ-03A-F SMC Solenoid valve workpiece vacuum, P/N: VCW41-5G-4-02-V-B-X27 SMC Solenoid valve workpiece vacuum, P/N: VCW3134V-02-5GS-B PCB: USHIO Auto micrometer, P/N: PB-1026B USHIO Motor interface, P/N: PB-1017B USHIO Motor interface, P/N: PB-1018B USHIO Rotary encoder I / F, P/N: HC ENC I/F USHIO Shutter control, P/N: PB-1040B NDG Switcher, P/N: PB-1028B-U00 Video IN, P/N: RICE-001 Video OUT, P/N: PLUM-001 MELEC Motor control, P/N: C-864V1 Screen / Peripheral: KEYENCE VT-7S Touch panel display AU Positioning visual screen Mouse for visual teaching PLC: MITSUBISHI CPU Unit, P/N: Q06HCPU MITSUBISHI Serial data unit, P/N: QJ71C24-R2 MITSUBISHI 64-Point IN unit, P/N: QX40 MITSUBISHI 65-Point OUT unit, P/N: QY50 MITSUBISHI 2-Axis positioning unit, P/N: QD75D2 MITSUBISHI High speed counter, P/N: QD62D MITSUBISHI Memory card, P/N: Q2MEM-8MBA MITSUBISHI QJC1724N MITSUBISHI QJ61BT11N Internal wiring; Sensor line / Communication line PC Host: AUPC Air mount: (4) Balance air cushions ULVAC DA-60S Vaccum pump Static elimination: Ion gun Air conditioner 2009 vintage.
Read More Close
USHIO UFX-2259B-AMB01 is a precision optical exposure equipment, designed for use in semiconductor and precision optics industries. It is built with leading-edge technology to provide users with reliable and high-performance exposure capabilities. The exposure system has a field emission electron gun assembly, making it capable of producing extremely high-resolution and repeatable exposures. The field emission electron gun can produce electron beams with an energy range of 1-30kV, providing excellent control over exposure dose levels. This feature ensures that precision exposures are achieved with a minimum of diffusion and electron scattering. UFX-2259B-AMB01 also features a high-precision wafer scanning unit. The scanning machine is composed of a stepper motor and stepper driver, used to scan the wafer at programmable speeds. This feature enables high speed and high accuracy wafer scanning, resulting in precise exposure pattern control. In addition, the tool comes equipped with a heated gas diffusion chamber, ensuring precise control over gas diffusion. The gas diffusion asset ensures uniform B-factors on the wafer, regardless of wafer size or exposure dose variation. This feature is especially important for producing high-precision wafers with extremely small features. An integrated vacuum extraction model is also included, providing optimal wafer loading and unloading. The extraction equipment is used to draw out any particles, contaminants or other residuals left behind by the exposure system, ensuring that the wafers remain free from contamination. Finally, USHIO UFX-2259B-AMB01 unit is equipped with a computer-controlled contact exposure processor. The contact exposure processor enables users to program exposure parameters and inspect the wafer after exposure. This feature helps to ensure that the results are reproducible and consistent. Overall, UFX-2259B-AMB01 is a powerful and reliable exposure machine, designed to provide maximum exposure accuracy and repeatability. Its features ensure high-resolution and uniform exposures, while eliminating any contamination risk. As such, it is an ideal choice for semiconductor and precision optics applications.
Read More Close
There are no reviews yet