Used USHIO UFX-2259B-AMB01 #9375526 for sale
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ID: 9375526
Vintage: 2009
Exposure system, parts machine
Shutter unit:
Exposure area, P/N; 2317-3246
Mask light source
Optical parts:
Light collecting mirror, P/N: 2306-3208
Plane mirror, P/N: 2836-7583
Projection lens, P/N: UPL-59EX
Microscope, P/N: 1000051733 / 3185-0361
Workpiece stage:
Beam splitters, P/N: 1000049959 (43.5)
Beam splitter, P/N: 1000029070 (11.5)
Motor unit (X, Y, Θ), P/N: 3026-0870
Work stage units:
Drive shaft pressure wheel unit
Drive shaft unit
Brake shaft unit
Clamp unit
Vacuum suction plate
Anti-uplifting press wheel group
Illumination / Microscope: Light cover light source gate
Micrometer (Precision sliding table), P/N: MHS2-13
OMROM Rotary encoder, P/N: E6B2-CWZ6C (2000P/R)
Reel receiving and discharging mechanism:
AC Motor, P/N: VHR206AGVJ / GV2G250
AC Motor, P/N: 2TK3GN-AGN25K
Clutch, P/N: AMC-40
(6) Drive / Brake units:
MATSUSHITA AC Servo motor (Drive unit), P/N: MSM5AZP1A
MATSUSHITA Motor driver (Drive unit ), P/N: MSD5A1P1EA
Clutch, P/N: AMC-5
Piping units:
SMC Solenoid valve workpiece blow, P/N: VCW31-5G-2-02-V-B-X41
SMC Solenoid valve workpiece vacuum, P/N: VP542R-5GZ-03A-F
SMC Solenoid valve workpiece vacuum, P/N: VCW41-5G-4-02-V-B-X27
SMC Solenoid valve workpiece vacuum, P/N: VCW3134V-02-5GS-B
PCB:
USHIO Auto micrometer, P/N: PB-1026B
USHIO Motor interface, P/N: PB-1017B
USHIO Motor interface, P/N: PB-1018B
USHIO Rotary encoder I / F, P/N: HC ENC I/F
USHIO Shutter control, P/N: PB-1040B
NDG Switcher, P/N: PB-1028B-U00
Video IN, P/N: RICE-001
Video OUT, P/N: PLUM-001
MELEC Motor control, P/N: C-864V1
Screen / Peripheral:
KEYENCE VT-7S Touch panel display
PLC:
MITSUBISHI CPU Unit, P/N: Q06HCPU
MITSUBISHI Serial data unit, P/N: QJ71C24-R2
MITSUBISHI 64-Point IN unit, P/N: QX40
MITSUBISHI 65-Point OUT unit, P/N: QY50
MITSUBISHI 2-Axis positioning unit, P/N: QD75D2
MITSUBISHI High speed counter, P/N: QD62D
MITSUBISHI Memory card, P/N: Q2MEM-8MBA
MITSUBISHI QJC1724N
MITSUBISHI QJ61BT11N
Internal wiring; Sensor line / Communication line
PC Host: AUPC
Air mount: (4) Balance air cushions
ULVAC DA-60S Vaccum pump
Static elimination: Ion gun
2009 vintage.
USHIO UFX-2259B-AMB01 is an exposure equipment designed for use as part of a lithographic or photomask imaging process. It utilises a novel combination of technologies to provide accurate, consistent, and repeatable exposure. The system includes a proprietary imaging engine, which provides the main source of illumination. This comprises a mercury arc quartz photo-cathode lamp with an emission line of 248nm and a four-phase shutter unit for controlling exposure timing. It is capable of exposing up to 5500 wafers per hour at an exposure power level of up to 10 mJ per cm2. The lamp has a lifetime of up to 2000 hours before needing to be replaced. Additionally, the machine includes a designed optical platform, which provides the main optics in the tool. This utilises a combination of reflective mirrors and a custom designed condenser lens to ensure that the light is correctly focused onto the wafers being exposed. This guarantees that the exposure will be of a consistent quality without any variance in terms of intensity or focus. Finally, the asset also includes an automated control model, which is used to monitor and control the exposure process. This is able to provide detailed information on the exposure process, such as exposure times, number of wafers exposed, average exposure level, and more. It also includes an onboard safety equipment that automatically shuts down the system should any anomalous readings be detected. Overall, UFX-2259B-AMB01 is a highly advanced, reliable, and easy to use exposure unit which is ideal for use in a lithographic or photomask imaging process. It provides precision control over the exposure process, and its combination of technologies make it highly accurate, consistent, and repeatable every single time.
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