Used USHIO UMA-802-H600NP #9128577 for sale

USHIO UMA-802-H600NP
ID: 9128577
Wafer Size: 6"
Vintage: 1996
UV curing system, 6" 1996 vintage.
USHIO UMA-802-H600NP is an exposure equipment designed for photolithography processes. It is a highly reliable system capable of increased throughput and minimal defects. It utilizes deep ultraviolet (DUV) 180nm lithography and exposure processes, in order to produce and transfer patterns onto a substrate. The unit features a large scanning stage that allows for scanning of large substrates up to 690x580mm in size. UMA-802-H600NP is capable of producing high quality, feature-rich, and intricate patterns in a wide range of microfabrication techniques. The machine is equipped with direct-light emission lamps, and also features a variety of lens configurations and field energies, enabling users to achieve the most precise outcomes. This machine utilizes laser-interfaced matrix alignment markers, providing an unparalleled level of accuracy in the pattern transfer process. The laser-interfaced matrix alignment markers are used in combination with a high precision encoder and a long-term exposure monitor to ensure that the pieces created are in-spec. In addition, USHIO UMA-802-H600NP is outfitted with a static pressure tool and patented 4-point mount asset, which enable users to achieve uniform and precise exposures with a high level of consistency over time. In this way, the model ensures that the customers' needs in photomask fabrication are fully met. The exposure equipment also features an automated reciprocating wafer loading system, allowing for increased productivity. Furthermore, UMA-802-H600NP is designed with an 8-inch flat-panel monitor, along with software featuring an intuitive graphical user interface (GUI), making it easy and simple to operate the unit. The machine also offers various customizable user settings to provide an optimized user experience and flexible operating conditions. Additionally, a uniquely designed power supply ensures reliable operation even in environments where there is a high potential for fluctuation in power consumption. USHIO UMA-802-H600NP is a state-of-the-art exposure tool that provides users with reliable operation and consistent results for a variety of photolithography applications. Through its combination of advanced technologies, the asset has the capability to produce precise and intricate patterns in a wide range of microfabrication techniques.
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