Used ATMI / ECOSYS CDO 862 #165259 for sale
URL successfully copied!
ID: 165259
Abatement system
H2 reagent addition system for treatment of NF3/F2
Chamber clean applications utilizing remote plasma, high acid, low particulate byproducts
Multiple Inlets: (6) inlet anodized aluminum entry assembly injects H2 to react with F2 to form HF
(3) Chamber tank with corrosion resistant recirculation pump (0.33 gpm freshwater utilization)
All wetted metal components are Hastalloy to mitigate corrosion.
ATMI / ECOSYS CDO 862 is an advanced facility equipment designed to automate a wide range of test and measurement processes. It is a modular equipment consisting of two independent units: Central Data Acquisition (CDO) and Environmental Control System (ATMI). CDO is the heart of the unit, providing a powerful yet easy to use graphical user interface from which data acquisition and test protocols can be configured. It also offers a wide range of features to facilitate efficient data management and logging. With multiple communication ports, the CDO can interface with multiple external instruments, such as data acquisition systems, signal analyzers, power supplies and transducers. ECOSYS module is designed to control the environmental test conditions associated with the tests or experiments being performed. Its advanced temperature and humidity control makes it possible to precisely regulate the environment during testing. This includes temperature and humidity control, conditioned ventilation, thermal management and environmental pre-conditioning. ATMI / ECOSYS also offers the ability to monitor and analyze parameters such as pressure, smoke, vibration, light, noise and other environmental inputs. ATMI CDO 862 provides a comprehensive set of software tools which can be used to configure and monitor test parameters. All the necessary data is instantly saved into the machine's memory for later retrieval and analysis. This includes parameters such as measurement units, control settings, test protocols and results. The tool also offers remote control capabilities and can be integrated with other systems such as data acquisition systems, laboratory information management systems, remote monitoring systems and industrial automation systems. ECOSYS CDO 862 is an ideal solution for a wide range of test and measurement processes, offering high performance and flexibility in a single package. It is designed to provide accurate and reliable data acquisition and control over many testing applications. With its advanced features, it enables users to optimize experimentation while increasing the functionality of their operation within the laboratory.
There are no reviews yet