Used EDWARDS EUV Ezenith #9300637 for sale
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ID: 9300637
Abatement and pump rack
Used for ASML EUV Lithography systems
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(9) EDWARDS iXH3045H Dry vacuum pumps
P/N: NRE418000
Running hours: 7,500 to 8,500.
EDWARDS EUV Ezenith is a facility equipment designed for semiconductor lithography applications. It is an essential tool for the production of high-resolution images of integrated circuits, flat-panel displays, and microelectromechanical systems (MEMS). The Ezenith utilizes extreme ultraviolet (EUV) radiation in order to create images on these components, allowing for precise features with low contamination risk. The Ezenith has a wide wavelength range, from 7.0nm to 40.0nm, meaning any EUV lithography application can utilize it. Additionally, its large optics aperture allows it to create long focal lengths which allows for imaging of larger sizes with higher resolution. The Ezenith also provides high process repeatability due to its vacuum and temperature-controlled environments, as well as its high-rigidity frame. This ensures that the lithography tool will recreate the same pattern on a project each time it is used. The Ezenith's active optics equipment aids in accurate alignment of components while its large dynamic zonal lenses allow for perfect imaging of substrates. The imaging system is equipped with high-sensitivity sensors that ensure image clarity and high precision alignment while minimizing exposure time. The Ezenith also contains a customizable user interface which allows for easy operation of the machine and for the customization of parameters for diffracting, imaging, and scanning. These features enable the Ezenith to yield the best workflow efficiency possible. All of this is supported by an advanced servo control unit which prevents the machine from crashing or malfunctioning. The Ezenith's servo control machine also helps reduce vibration, an issue that can cause interference in images if left unchecked. Finally, the Ezenith features easy maintenance options, making it an ideal choice for cleanroom and semiconductor fabrication shops. It can be configured to self-diagnose itself, identify problems, and allow for recalibration if needed. This eliminates the need to shut down the machine while repairs are performed, allowing it to achieve maximum uptime. Overall, EUV Ezenith is an incredibly advanced facility equipment for semiconductor lithography applications. Its many features, such as its active optics tool, zonal lenses, servo control asset, and user-friendly interface, make it a perfect choice for cleanroom and semiconductor fabrication shops looking for speed, accuracy, and repeatability.
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