Used FSI / TEL / TOKYO ELECTRON 500A #9230836 for sale

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FSI / TEL / TOKYO ELECTRON 500A
Sold
ID: 9230836
Vintage: 2000
System 2000 vintage.
FSI / TEL / TOKYO ELECTRON 500A is a multifunction facilitie equipment with impressive capabilities. It provides a strong foundation for fabrication of a variety of devices and devices such as semiconductors, displays, and nano-devices. This equipment encompasses four core components such as a lithography process head, a substrate handler, a deposition equipment and a gas supply system. The lithography process head is a precision motion unit, which enables the movement of stages and optics, enabling users to fabricate devices with accurate feature dimensions. This machine consists of a rail and space clamp on each linear axis, allowing movements with extremely low motion noise. The structure helps to minimize positioning error and drift during the process. The substrate handler is designed to reduce particle contamination and enable reliable thin-film deposition by providing a clean substrate environment and temperature uniformity. This components also supports multiple substrate carriers to cover a wide range of device sizes from small substrates to large substrates up to 200 mm in size. The deposition tool is used to deposit thin layers of material on substrates with precise dimensional control. It supports desired temperature and pressure settings for deposition of alloys and compound materials. The asset's huge capacity enables simultaneous introduction of multiple gas sources including volatile gases, allowing independent deposition of materials on multiple substrates. Finally, the gas supply model provides perfect compatibility with the deposition equipment offering safe and reliable supply of chemical gas during fabrication processes. It has a storage vessel, a gas mixer, a needle valve block and a mass flow controller, all working together to provide a reliable, stable, and high-speed gas supply for the deposition system. To sum it up, FSI 500A features an optimized structure and components for precise processes, optimal performance, and a high degree of safety and efficiency. The four core components described above, together with its integration into the fabrication process, make it an essential part of the fabrication process.
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