Used AMAT / APPLIED MATERIALS 9500 #9226045 for sale
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ID: 9226045
Wafer Size: 8"
Implanter, 8"
Bernas source
Belt drive
PA Tube
9600 Cryo compressor
LEYBOLD Turbo controller
Isolation transformer
Wheel, 8"
Fixed restraint
Clips & heat sink
Hollow gripper
Single position beam stop
Does not include:
Roots roughing pump
Source cooling tube & extraction
Turbo pump
Beam line roughing pump
Monitor or PC controller
Missing parts:
Chamber upper part electrical feedthrough
KF Blank flange
Side wall latch interlock override switch box
Board missing from above wafer arm servo chassis
Blade sensor & feedthrough
Cooling water pipework
ARGON Gas module
Gas box filament chassis
Artisan power supply & one board
Gas box
(3) High pressure gas panels
Upper & lower magnet coil
Push fit air connector
Batch notch orientor
BNO Micro controller
Front bezel & loader door pic
Cryo pump
SCIM Box.
AMAT/AE AMAT / APPLIED MATERIALS 9500 is a high-energy ion implanter and monitor equipment designed for precision wafer implants. It is a dependable, advanced system for high quality implantations in the semiconductor, MEMS, and other related industries. The heavy ion implanter is powered by a 1250 kW hot-swappable power supply, providing a consistent and reliable high beam current for plasma and ion implantation. It utilizes a variable energy range from 0.1 to 2880keV and can handle sample sizes up to 9" x 9". With variable Implant Acceleration Voltage (IAV) up to 30kV and variable extraction voltage of up to 850V, it can provide high-precision implantations with an excellent rate of stability and quality. The AE AMAT 9500 features an independent implant positioner, allowing for simultaneous programming of multiple ions with a single controller. It includes an automated aluminum etch chamber and silicon chamber, enabling effective etching and rapid deposition of implanted material. Along with its integrated cryogenic temperature control unit, the AE APPLIED MATERIALS 9500 provides excellent thermal stability during implant delivery. Additionally, the machine features a back-reflection monitor and beam monitor, ensuring accurate beam alignment with process tools. A 12.1" LED crisp-clear monitor provides graphical visualization of entire implantation process, from implantation start to completion. The real-time data logging record is stamped along with full cycle logging, to ensure proper implantation. To ensure safety, the AE 9500 is designed for proper radiation shielding and is rated for use with a wide range of implant materials and isotopes. The rugged mechanical construction has been designed for exceptional reliability and stability, for a tool that is designed to serve as an implantation industry standard.
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