Used AMAT / APPLIED MATERIALS Quantum Leap III #9086473 for sale
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ID: 9086473
Wafer Size: 12"
High current ion implanter, 12"
Mini E: Felcon unit fitted, No UCAS
MMTX
VME
Light tower fitted
Post Accel QIII Type
Tilt: +/- 15°
Scan and beamstop mods
QIII ABM Option fitted
(6) Positions gas panel
(1) High pressure toxic module
Source: QIII with (4) pin connectors
IHC Chassis: Single Arc PSU
DSP Type: 0100-00838
Tetrode version:
Surge R: 9090-01382
PSU: 1140-00161 (A1028760)
Extraction area:
EVR fitted
Delate: 0100-01445
Pre Accel PSU: 9090-00397ITL
Leybold Mag drive Digital controller
VME & Main PDU Side
On-board CTI Cryo controller
Pumps removed
CE-Marked.
AMAT / APPLIED MATERIALS Quantum Leap III (QIII) is an ion implanter and monitor equipment designed to deliver highly accurate and precise dose control during production. The system's Pulse-Width Modulated (PWM) technology drives a broad range of ion species at low to medium energy regimes, catering to a host of implant applications. Utilizing one of two accelerator sources, the QIII is able to adjust and maintain the hysteresis for each process. The QIII features an integrated high-sensitivity Beam Position Monitor (BPM) for calculating beam position at all times, allowing for parallel correction of straightness errors and a precise target alignment. Its integrated Beam Shaping Unit (BSS) also delivers a homogenous beam profile for consistency between runs and batches. Furthermore, the QIII can be upgraded with a fast arc table in case of non-standard implants that need to be completed in an expedited time frame. The machine's open platform is capable of processing both standard and non-standard implant recipes, with each configuration saved as a layout in the tool. In addition, its customizable hardware setup allows for precise run-by-run adjustments to accommodate different implant layouts with minimal downtime. The QIII also can run in both fast and slow processes, allowing a user to adjust the dose rate to achieve a higher throughput yield. To ensure accuracy and safety during an implant, the QIII features a series of alarms and shutdowns. In the event of a malfunction, the asset is designed to quickly shut down in order to decrease any potential damage that may occur. Lastly, the model's extensive Service Menu offers automatic diagnostics, which help to quickly diagnose and repair any issues. AMAT Quantum Leap III (QIII) is a reliable and precise ion implanter and monitor equipment, perfect for handling low to medium energy implants. Its various customization options make it ideal for a variety of implant applications, with its integrated alarms and shutdowns providing the necessary safety and accuracy.
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