Used AMAT / APPLIED MATERIALS Quantum X Plus #9175678 for sale
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ID: 9175678
Wafer Size: 12"
Vintage: 2007
High current ion implanter system, 12"
Currently installed
2007 vintage.
AMAT / APPLIED MATERIALS Quantum X Plus is an ion implanter and monitor designed to handle the stringent requirements for high-yield production semiconductor manufacturing. It is designed to meet the absolute highest reliability standards with increased productivity that is driven by the highest level of stability, equipment intelligence and level of control. This instrument is capable of applying precise amounts of precisely focused ions to precisely patterned substrates without damaging the underlying film or substrate. This results in more efficient and reliable device fabrication. AMAT Quantum X Plus has a beam current of up to 1.2 milliamperes and is suitable for the highest energy processing needs. The available beam scanning area easily adapts to variety of substrates and the beam scanning system guarantees linear beam scanning with uniformity and accuracy. The unit also provides an instantaneous imaging machine to monitor the real-time ion implantation process. This monitor also provides a graphical display of the implant dose, substrate area and film integrity, allowing the user to make corrections and changes on the fly. Furthermore, APPLIED MATERIALS Quantum X Plus features automated point-of-use monitoring which minimizes downtime and increases productivity. This tool stores images and parameters of the most common substrates for quick and efficient recall. The user can also customize the implant process with the on-board programmable controller, for tuning of the beam and substrate parameters. Quantum X Plus has excellent controllability, ion dose distribution, and short process times. This makes it an ideal choice for processor ion implantation and monitoring in high-volume production applications. The asset's reliability and accuracy ensures the utmost confidence in the quality of parts produced. The combination of the advanced technology and hardware with specialized software solutions make AMAT / APPLIED MATERIALS Quantum X Plus one of the most advanced and reliable ion implantation and monitor workstations available.
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