Used AMAT / APPLIED MATERIALS Quantum X Plus #9220637 for sale
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ID: 9220637
Wafer Size: 12"
Vintage: 2005
High current implanter, 12"
Energy option: LEAP Ultra low (0.2-80 keV)
APPLIED Door openers
Stand alone
Signal tower: Front and back of tool
Processor:
ISPM Processor
Isocentric scanner
Ultralife QX+ ion source
G1 Electrode: Graphite
Gas panel box: Argon system and gas purge
TEM
LEYBOLD Turbo pump
(3) Cryo pumps
SPECTRA Residual Gas Analyzer (RGA)
MMTX Transformer
Gas panel:
8-Position: AsH3, PH3, GeF4, BF3, SiF4, CO2, 2-Blank
Wafer loader:
(4) Stations SEMI standard wafer loader
Hermos tag reader
SEMI E84 OHT PIO Kit
Low backside particle vacuum end effectors
2005 vintage.
AMAT / APPLIED MATERIALS Quantum X Plus is a highly advanced ion implanter and monitor designed to provide robust material characterization and process control for wafer processing. AMAT Quantum X Plus offers unmatched performance and reliability, as well as leading-edge features and capabilities. APPLIED MATERIALS Quantum X Plus is a high-performance ion implanter that is capable of implanting ions of virtually any type, including boron, arsenic, phosphorous, and carbon atoms. It is designed to provide precise levels of precision, accuracy, and repeatability. With its advanced electron gun technology, it can control the ion implantation process down to the atomic level, providing optimal wafer implantation and material characterization. Quantum X Plus is equipped with an advanced ion monitoring system that allows for remote process monitoring and easy operator feedback. This system allows for wire-less adjustment of implantation parameters, for real-time optimization of the implantation process. It continuously analyzes ion current responses and automatically adjusts beam parameters and measurements to optimize the process. The instantaneous diagnostic capabilities of the monitor enable quick fault isolation and repair. AMAT / APPLIED MATERIALS Quantum X Plus features a range of advanced safety and environmental features as well. Its multi-level contamination tester keeps ion contamination levels to a minimum, while its safety compliance lockdown mode prevents unauthorized use. It also offers several environmental monitoring features, such as vibration and temperature probes, for improved system stability. Storage and transport of wafers is made easy with AMAT Quantum X Plus' transport chambers. APPLIED MATERIALS Quantum X Plus is a powerful and reliable ion implanter and monitor, designed to deliver robust material characterization and process control. Its advanced features and capabilities, combined with its ability to control ions down to the atomic level, make it an indispensable tool for wafer processing.
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