Used AMAT / APPLIED MATERIALS Quantum X Plus #9248922 for sale
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ID: 9248922
Wafer Size: 8"-12"
Vintage: 2007
High current ion implanter, 8"-12"
FI + Load ports
Quantum III beam line
Beam line module
Beam line rack
Processor rack
Processor module
Ion source module
Computer table
Accessories
Mains matching transformer
ISO TX
Roof panels
Enclosure ends panels
Doors
Ground plane rack
Ground plane ISO TX to rear of processor
Quantum X plus safety guards
Cryo lift rail long
Goal post
Enclosure rails
Earthing lances
Earthing blade assy
Earthing blade shaft / Handle
Beamline doors enclosure
Beamline door struts
Beamline extraction
Beamline ground plane
Cryo lift rail
Roof extraction
Lights and diffusers
Monitors
Enclosure doors
Compressor
Heat exchanger
Turbo pump
Cryo Pump with cage
2D Isocentric scanning system
With high tilt up to 60°
Frequency: 50 / 60 Hz
Full load current: 125 A
Overcurrent protection: 150 A
Chillers
2007 vintage.
AMAT / APPLIED MATERIALS Quantum X Plus Ion Implanter & Monitor is an advanced tool designed for efficient and accurate ion implantation processes in high-volume production. AMAT Quantum X Plus is a state of the art ion implanter that improves upon existing ion implanters with its high-tech features and design. APPLIED MATERIALS Quantum X Plus Ion Implanter & Monitor is designed with superior beam-shaping technology, allowing for superior precision when implanting ions into wafers. It also features a unique Neutral Beam Dispersion equipment that increases the area coverage of implantation. Furthermore, it has an integrated High Tolerance Active Neutral Beam-shaping system which minimizes taper effects and non-uniform implantation. Quantum X Plus is also designed to provide high speed and accuracy for various implantation processes, providing superior performance compared to other available systems. It has a high dose rate that is capable of delivering an implanting dose rate of 4-7 dpa/min, a superior resolution capability for high throughput implantation, and a scan speed of up to 1000-5000 Hz. Additionally, AMAT / APPLIED MATERIALS Quantum X Plus Ion Implanter & Monitor features a variety of sensors that provide feedback for the operator and monitor the environmental conditions. AMAT Quantum X Plus is also designed with a robust safety unit that includes protection from radiation, fault diagnosis, and protection against accidents. Additionally, APPLIED MATERIALS Quantum X Plus Ion Implanter & Monitor is designed with high-end software packages to provide operators with precise control over the ion implantation process, allowing for automated processes with minimal operator interaction. In conclusion, Quantum X Plus Ion Implanter & Monitor is a technologically advanced machine designed to improve the accuracy and efficiency of ion implantation processes in high-volume production of wafers. The tool offers a high speed implementation process, precision beam shaping, increased area coverage of implantation, and robust safety systems. This highly-sophisticated asset provides the ideal solution for achieving superior results in applications that require precision and reliability.
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