Used AMAT / APPLIED MATERIALS / VARIAN / AXCELIS Spare parts for 350 / 350D / 350XP #9236902 for sale

Qty / Part number / Description (2) / 3200023 / 500AB 3 1 / Humphries (40) / - / Springs for 350D (20) / 00 674494 01 / Shield retainer kits (2) / 0010-90162 / Resistor chain supplies (1) / 0020-35764 EEP-P1-355 / Slit valve (1) / 0020-80037 / Pre-defining aperture (1) / 0020-80180 / Liner end filament (2) / 0020-80181 / Liner end anti-cathodes (2) / 0020-80236 / Aperture low dose gf (1) / 0020-82056 / Top shield ins. pfs (3) / 0020-82135 / Tungsten filament S (1) / 0020-82550 / Holder pre-defining aperture (1) / 0020-82808 / Pre-def holder aperture (1) / 0020-82821 / Neutral insert (1) / 0020-82825 / Guide tube shield (1) / 0020-83425 / Ground electrode (6) / 0020-85362 / Insulator shields (21) / 0020-94844 / Insulator I (9) / 0020-97516 / Vaporizers (1) / 0020-98877 / Outer insert (2) / 0020-98879 / Insert neutral gf (2) / 0040-91798 / Feed Thru assy gas line vcr (1) / 0040-94018 / Negative filament clamp (1) / 0040-94526 / Negative filament clamp, Molybdenum (3) / 0042-0001 / Bearing thrust (2) / 0045-94347 / Nozzle oven mk2 (4) / 006-062-001 / Bearing rotary (1) / 0067187901 / Pwa,h2o,flow,2.5gpm (1) / 00-671880-00 / Relay driver 24v / 110vac pcb (1) / 006722500 / 5vdc (1) / 0067814903 / Prox. switch cable (1) / 0068068200 / Impedance interface (4) / 00927001 / Pumping tube (806) / 010 / Buna-n 2-010 (2) / 0100-00435 / Coupler shaft/spndl mot (1) / 0100-20066 / Analog sync detect (1) / 0100-90221 / Arc linear (1) / 0100-90315 / Scan control (7) / 0110-0003-0016 / Nut spacer (3) / 0110-0003-0019 / Spacer 110-004-158 (14) / 0110-0003-0062 / Nut insulating (13) / 0110-0003-0063 / Nut insulating top (15) / 0110-0004-0160 / Ball bushing spacer (8) / 0110-0004-0161 / Tilt cam follower shaft (1) / 0110-0005-0019 / Spacer (904) / 012 / Buna-n 2-012 (5) / 012-038 / Coupling shaft (1) / 012256 / Ion gauge cable (1) / 01281617-01 / Phd ap 1 1/8x2-d-p (1) / 01292 / Current trans 50:5a 50-400hz 600 vins 10kv (22) / 01328004 / Corona ring (47) / 01343002 / Accel collumb resistor (3) / 0141-0002-0001 / Rotary actuator r11a 3180-b-m-o (2) / 0141-0018-0001 / Load switch actuator (1) / 0141-0021-0001 / Beam shutter assy (902) / 015 / Buna-n 2-015 (3) / 0154 / Seal (704) / 017 / Buna-n 2-017 (1) / 018-100B / Motor and encoder (1) / 0190-00970 / Scr (1) / 02026993400 / Right angle drive 3.1 (3) / 021-NR QJ / Bimba (502) / 022 / Buna-n 2-022 hydraulic cylinder block (5) / 0243-1454-0002 0342-0709-0001 / Hv probe (1) / 0248A-14128 / S valve (1) / 0261-0010-0001 / Amplifier servo brush type dc 5a5 (26) / 0295-0006-2001 / Pac man aperture (4) / 0295-0014-2001 / Quadrapole aperture (12) / 0295-0016-1001 / Beam shutter aperture (21) / 0295-0017-2001 / Defining aperture plate (1) / 0295-0043-0001 / Aperture upstream (5) / 0295-0044-0001 / Aperture aluminum (3) / 0298-0125-0001 / Inner chamber upload arm 6 in (1) / 0298-0129-0001 / 5" chamber upload arm (2) / 0298-0167-0001 / 5 in pick arm (1) / 030-0002 / Photo sensor 030-0002 (1) / 03000Y20 / Power supply (4) / 0301-0068 / Switch interface (1) / 03030 / Translator board (2) / 0303-0124 / Pcb (1) / 03-16698-00 / Cv-colbilt (4) / 031SS400B000060 / Valves (148) / 033 / Buna-n 2-033 (10) / 0342-0049-4001 / Chamber vac (13) / 0342-0050-4001 / Condition mod. assy. (1) / 0342-0136-4001 / Beam Current Integrator (11) / 0342-0138-4001 / A 17 beam current display driver (11) / 0342-0139-4001 / Process control a-15 (4) / 0342-0148-4001 / Control panel with pcb (8) / 0342-0156-4001 / I/o status display a4 (10) / 0342-0160-4001 / Relay driver interface a-2 (12) / 0342-0161-4001 / A-13 (3) / 0342-0164-4001 / Hvps control a-10 (1) / 0342-0170 / Present Value Display (9) / 0342-0175-4001 / System alarm a-12 (2) / 0342-0185 / A3 (3) / 0342-0217 / Beam monitor (5) / 0342-0218 / Beam monitor amp (1) / 0342-0219 / B-4 sensor amplifier (1) / 0342-0219-4001 / Sensor amp (4) / 0342-0221-4001 / B12 carrier motor drive (1) / 0342-0228-4001 / B5 (1) / 0342-0232 / A-22 Board (9) / 0342-0254-3001 / Magnet power supply reg. (7) / 0342-0256-4001 / Source terminal datalink (1) / 0342-0257-4001 / Magnet term datalink (4) / 0342-0259-3001 / Source insulator (16) / 0342-0261-4001 / Extraction housing assy. w/ source insulator (4) / 0342-0274-200 / Surge resistor assy. (18) / 0342-0290-4001 / Arc discharge p.s. (13) / 0342-0291-4001 / Filament p.s. (36) / 0342-0311-1001 / Accel/deccel feedthru (17) / 0342-0369-3001 / Copper filament buss (3) / 0342-0369-3002 / Filament rod (32) / 0342-0375-3001 / Suppressor screen complete (35) / 0342-0384-1001 / Suppressor feedthru (6) / 0342-0406-4001 / Magnet p.s. (8) / 0342-0408-0001 / Beam current integrator 2 (6) / 0342-0413-4001 / A 16 pcb (6) / 0342-0433-4001 / Valve driver (3) / 0342-0436-3001 / Indexer port load (4) / 0342-0437-4001 / Wafer cooling controller (5) / 0342-0441-4001 / I/o e4 (5) / 0342-0442-4001 / Driver display (5) / 0342-0445-4001 / Thermocouple amplifier e9 (6) / 0342-0448-4001 / Cpu e-3 (6) / 0342-0450-4001 / E-2 (1) / 0342-0452-3001 / Endstation keyboard (5) / 0342-0452-4001 / Microprocessor e7 (8) / 0342-0458-4001 / E6 (10) / 0342-0459-4001 / E8 interface (7) / 0342-0466-3001 / Wafer sensor assy. (5) / 0342-0519-2001 / Vaporizer source crucible (1) / 0342-0522-0001 / Pcb (80) / 0342-0549-2001 / Resistor stl12 (4) / 0342-0565-3001 / Cooling plate (3) / 0342-0568-2001 / Oven tc vaporizer sce plate (8) / 0342-0576-4001 / Hv p.s. control a-10 (1) / 0342-0581-2001 / Plate saay oven gas (5) / 0342-0589-2001 / Vaporizer heater (7) / 0342-0601-4001 / Filament controller (7) / 0342-0607-0001 / A-19 (11) / 0342-0646-2001 / Lens feedthru (5) / 0342-0647-4001 / Electrostatic quadrapole (4) / 0342-0648-3001 / Accel column b (23) / 0342-0652-4001 / Terminal hv datalink (2) / 0342-0667-3001 / Rotary shutter assy (28) / 0342-0668-4001 / Printer interface (5) / 0342-0678 / Scan amp (2) / 0342-0679 / A-20 System Mon I/F (6) / 0342-0679-4001 / System monitor interface a-20 (3) / 0342-0681-4001 / Pcb (8) / 0342-0684-4001 / I/o status interface a-1 (3) / 0342-0685 / Autoflood control (3) / 0342-0689-4001 / Pcb in computer (5) / 0342-0707 / Interface computer (2) / 0342-0716-4001 / Discharge power supply pcb (1) / 0342-0717-4001 / Amu assy. (5) / 0342-0722-4001 / 100 meg 1% resistor complete (1) / 0342-0748-0001 / CAP PCB (3) / 0342-0810 / Beam Scanning Con. Unit 300 (4) / 0342-0854-4001 / Autoreg. controller unit 500 (1) / 0342-0887-4001 / Insulator column (1) / 0342-0887-4001 KIT / Pumping tube kit (2) / 0342-0900-4001 / Indexer driver (5) / 0342-0908-0001 / Data link (3) / 0342-0910-4001 / Servo amp (1) / 0342-0913-0001 / Keyboard (1) / 0342-0917-0001 / Term & accelerator control (1) / 0342-0918-0001 / Terminal control (2) / 0342-0922-4001 / Driver (7) / 0342-0934-3001 / Corona shield (1) / 0342-0967-4001 / Power monitor (1) / 0342-0977-4001 / Input/output h-3 (1) / 0342-0982-4001 / Vaporizer Power Supply (4) / 0342-0983-2001 / Opto slotted sensor (2) / 0342-0987-0003 / So line (3) / 0342-0987-4001 / Buffer h6-h9 (2) / 0342-1000-4001 / Power i/o h-4 (2) / 0342-1013-4001 / Endstation mpv h-2 (1) / 0342-1027-0002 / High current mtr driver (2) / 0342-1027-4001 / Pcb (7) / 0342-1033-4001 / Isolation buffer (1) / 0342-1049-0001 / Scan generator horiz (1) / 0342-1049-0003 / Scan generator horiz (2) / 0342-1050-0001 / Scan generator vert (1) / 0342-1050-0003 / Scan generator vert. (1) / 0342-1051-0001 / Scan clock card (1) / 0342-1052-0001 / Scan system k-5 (3) / 0342-1052-0002 / Scan system k5 (3) / 0342-1053-0001 / Multifunctional k-6 (5) / 0342-1054-0001 / Front panel i/o k-7 (1) / 0342-1056 / Beam monitor unit 300 (2) / 0342-1077-4001 / A24 (2) / 0342-1084-2001 / Card rack cable (2) / 0342-1101-4001 / Source datalink term (2) / 0342-1142-2001 / Sensor d (2) / 0342-1312-1001 / Gas bottle cga 180 (1) / 0342-1331-0001 / Beam monitor backplane (1) / 0342-1334-0001 / Pcb (1) / 0342-1340-0001 / Scan plate (2) / 0342-1363-0001 / High temp vaporizer crucible (1) / 0342-1386-0001 / Scope (3) / 0342-1402-0001 / Scan amp hv mod (1) / 0342-1403-0002 / Electronic mdl assy (2) / 0342-1429-0001 / Magnet power supply (2) / 0342-1432-0001 / Filament power supply (1) / 0342-1435-0001 / Discharge power re (3) / 0342-1446-0001 / Inner magnet liner assy (7) / 0342-1449-001 / Outer magnet liner assy (7) / 0342-1487-0001 / Scanner cable kit (11) / 0350-0025-0004 / H.v. driver (1) / 039778 / Sensor (2) / 040.5-DP / Bimba cylinder (1) / 0403000034X 6546 / Transformer (3) / 04073001 / Accel/deccel (4) / 040889 / Vacuum controller switch (1) / 04298001 / Lens feedthru 2 (4) / 0455-0001-0002 / Beads (6) / 0469-0006-0002 / Bearing mfs 3kdd (4) / 0469-0007-0001 / Bearing flg tapered (3) / 0470-0001-0001 / Thrust needle bearing (50) / 0471407501 / Insert (1) / 04-715920-01 / 3180/3190 buffer bd (1) / 04726001 / Scan monitor (4) / 0475-0012-0001 / Slit bellows (1) / 0478-0001-0001 / Upper bell lock (19) / 0483-0004-0001 / Timing belt 56 groove (37) / 0483-0005-0001 / Timing belt 115 grooves 5/16w 176704 (2) / 04930001 / Feedthru electrode (3) / 0531-F0472-301 / Thermocouple vacuum gauge (109) / 0547-0068-0001 / Graphite outer liner replacement (2) / 0547-0069-0001 / Magnet liner block (2) / 0547-0076-0001 / Rod support block (2) / 0547-0092-0001 / Lower drive block (1) / 0567-0026-4001 / Extender board (5) / 0567-0052 / Relay panel (3) / 0567-0053-4001 / Beam current display driver (6) / 0567-0064-4001 / I/o switch interface (3) / 0567-0109-0001 / - (2) / 0567-0137-0001 / - (2) / 0567-0228-0001 / Ion gauge controller bd (1) / 0567-0230-0008 / Mpu (1) / 062 4E1 36 / Humphrey valve (2) / 06891001 / Motor bracket (1) / 06951001 / 44 tooth sprocket (2) / 0696001 / Source housing seal (1) / 06961001 / Retainer (1) / 07092001 / Water baffle (9) / 07140001 / Arc chamber support plate (10) / 07142001 / Seal bearing (6) / 07149001 / Support tube (55) / 07159001 / Copper strap (1) / 071665001 / Drive motor sensor (2) / 07269001 / Feed-thru shaft (1) / 07306001 / Source valve assy (1) / 0737801 / Liner inner (14) / 07572001 / E/s chamber faraday cage bushing (38) / 0762-0031-0004 / Linear bearing super 8 (9) / 0762-0060-0001 / Plastic bushing assy (1) / 0781-0020-0002 / Seo cable assy (6) / 0781-0133-0001 / Vaporizer cables (1) / 0781-0307-0001 / Photo interrupter (1) / 0781-0329-0001 / Home sensor cable (2) / 07974001 / Wafer guide bumper (1) / 07F11AB / Filter oil sep (15) / 0805N81 R12 / Bearing (1) / 08060020001 / Load lock cam 7-27 (1) / 0810-F8538-302 / 810 vac meter (2) / 08148001 / Source filament power supply (1) / 08214001 / Source magnet meter (3) / 0822082 / Vaporizer power supply (1) / 08282001 / Slit aperture (4) / 08397001 / Source magnet (157) / 0843-0007-2001 / End cap non countersunk (14) / 0843-0007-2002 / End cap countersunk (7) / 08484001 / 350d ion source complete (2) / 08486001 / Compression collar (3) / 08494001 / Gas feed tube sst (5) / 0854-0001-0001 / Di water filter (6) / 0854-0004-0001 / Differential seal (2) / 0854-0005-0001 / Seal cartridge (20) / 0871-0002-0001 / Catch flange dorlec dlh-067 (4) / 0881-6421-08-064 / Hcig gauge rotary switch (2) / 08942 / Slied cf3000 (6) / 08-943002 / Bracket slide (3) / 0895-0005-4001I / Arc chamber improved (5) / 0896-0005-4001 / Standard arc chamber (7) / 08T0038102 / Plug for putting on oring (3) / 09-04399 / Power distribution (3) / 09-04433 / I/o expansion (1) / 0906-0089-0001 / Ion gauge controller old style (1) / 0906-0143-4001 / 4 MFC GAC Controller (4) / 0906-0191-0001 / 6200/a chamber vertical motor driver retrofit (1) / 0906-0235-0001 / Ion gauge controller (10) / 0910-90047 / Fuses 25a (1) / 092-DP / Bimba 092-DP (1) / 09392001 / Amu cal (28) / 0951-0003-1001 / Filament clamp (4) / 0953011900 / Bellows assembly (2) / 09782001 / DVM Readout (30) / 0981-0005-1001 / Filament support collar (290) / 0985-0002-0037 / Buna-n 2-118 (70) / 0985-0004-0039 / Buna-n 2-239 (390) / 0985-0005-0039 / Buna-n 2-021 (90) / 0985-0007-0003 / Buna-n 2-241 (90) / 0985-0011-0002 / Buna-n 2-330 (15) / 0985-0011-0003 / Buna-n 2-274 (50) / - / Springs small (4) / - / Resistor, power supply: 10000 V (1) / 100.019.006 / Part (1) / 100001691 / NW 80 seal kit set (1) / 100-005-018 / Flange cartridge (1) / 100-010-304 / Interior arm load 6" (4) / 100-010-330 / Arm 6" (1) / 100-019-007 / Tool (1) / 100-019-008 / Tool (1) / 100-019-010 / Wedge (1) / 100-019-026 / Plate (1) / 100-019-027 / Plate (1) / 100-019-028 / Plate (2) / 100-019-029 / Tool (8) / 1001-0016-0001 / SKM electrode connector (2) / 10020721 / Seal pump (3) / 10021865 / Clampless disk 6" (1) / 10027010 / HITEK POWER Series 400 (1) / 100-40 / Accel high voltage power supply (2) / 10040729 / D60 pump (1) / 1007-1063 / Process transport (1) / 100991588 / Valve v6 (2) / 100B110 / Flow switch (6) / 101-0236 / Ms/636 (1) / 101-0692 / Motor (2) / 10109-1 / End station control (1) / 101334001 / Furn vaporizer assy (3) / 101342001 / Digital main control (3) / 101S1N10 / Levelite universal controller with sgl-channel (1) / 1020 / Modulus one (3) / 1020 ADAPTIVE SCIENCE CROP / Pcb (1) / 1020380 / Remote scanner emitter (7) / 1021368-0099 / Repeller strap (1) / 1022791 / Regulator 0 to 25 psi (1) / 1027-0068-0001 / 133 cell controller (11) / 103075001 / Sleeve insulator (6) / 1031050 / Filament clamp (13) / 1031457-0689 / Side plat (1) / 103-540-26 / SANYO Denki 103-540-26 motor stepper assy z (2) / 104086631 / Ceramic terminal block (1) / 1046-TE44-1032 / Cat valve (2) / 105007011 / Extraction electrode (2) / 105080001 / Graphite (4) / 105086001 / GND Aperture with B-gate (3) / 1051180001 / Extraction moly electrold (1) / 105157001 / Filament assy. (2) / 105195001 / XP current integrator (2) / 105212001 V87-305353 / De handlers set with cables 7el (1) / 105225001 / 6" wafer handler assy air cylinder (1) / 105488002 / De endstation (1) / 105489001 105493001 / De endstation with fraday (4) / 105495001 / Set-up flag (1) / 105621002 / Cable assy connector beam g (1) / 105710001 / PCB relay rev 3 (4) / 105867004 / Plt, sd, bm, ctch,100mm (4) / 1062DVS-3.00-1 / American beam shutter cylinder (2) / 106302001 / Wafer lift cable (1) / 1066-0002-0001 / Coupling flexible (8) / 1066-0006-1001 / Open crucible coupling (3) / 1066-0007-1001 / Closed crucible coupling (1) / 1066-0036-0001 / Coupling pump (1) / 10720135 / High voltage switch (2) / 107373003 / Disc controller tm990/303a (2) / 107375001 / U44 eprom 9/18/92 (1) / 107552001 / Chuck tip platen (1) / 107787001 / Extraction voltage control (2) / 107879002 / Power fail/rtc-xp (3) / 108086001 / Air cooled scan amps (2) / 10814001 / Bracket suppression 160kV (1) / 108184002 / Suppression bracket (3) / 108307001 / Shield center faraday (1) / 108573002108753002 rev-a2 (2) / 108578804 / Dose processor (1) / 108857001 REV -1 / Dose processor (2) / 109003001 / Lift cylinder assy (5) / 109033001 / Fps-613 chuck pancake air cylinder (3) / 109061001 / Es/als interface rev 2a (1) / 109386001 / Center faraday bias feed (2) / 109432001 / Filament assy rev a (7) / 1097100 / Source gate (14) / 1097101 / Source gate shim (2) / 109716001 and 109716002 / Cooling plates (2) / 109794001 / Insulator d (2) / 109795001 / Source roughing connector (2) / 109841006 / 2 6" 300xp conversion kit (1) / 10C19B4-1 / Valcor valve cv 120 125 psi 115v/60hz 10w (4) / 10N3C1620YZP / Bearing (1) / 10PS-P10 / Sprague 1uf 1kv non polarized capacitor (1) / 1100001 / Kaiser tank (4) / 1100002 / Variac driver (1) / 110-0012-0038 / Shaft coupling (1) / 110-003-002 / Main clamp ring (30) / 110-003-019 / Pivot bearing cap (14) / 110-003-064 / Washers brown (15) / 110-003-065 / Ball bearings (3) / 110-004-001 / Timing belt (1) / 110-004-082 / Idler bearing (12) / 110-004-158 / Cam base spacer (15) / 110-004-159 / Cam follower cap (1) / 110-004-161 / Tilt cam follow shaft (7) / 1100046 / H.v. power supply controller (3) / 110-005-004 / Lift rod (7) / 110-005-016 / Cartridge bot flange (1) / 110-005-017 / Differential seal (6) / 110-005-018 / Cartridge top flange (7) / 110-005-020 / Seal reainer (13) / 1100054 UA740C / Op amp ua740c (7) / 110-006-001 / Bearing kaa15xl0 (5) / 110-006-009 / Spacer (1) / 110-006-023 / Plate arm mounting (1) / 110007 & PCBS 150027 & 150021 / Feedback assy with PCBs (6) / 110-007-0032 / Yoke cam follower (1) / 110-007-023 / Main drive system block (4) / 110-007-028 / Micro slides (2) / 110-007-029 / Precision bearing (7) / 110-007-030 / Bearing (20) / 110-007-044 / Springs 6200 (2) / 110-007-051 / Align rod couple (1) / 110-007-179 / Mod bod cam load lock (1) / 110-009-008 / Vert ballbushing (10) / 110-009-009 / Horizontal ball rod (5) / 110-011-002 / Shaft 110-011-002 (1) / 110-012-016 / Bearing screw shaft (5) / 110-012-052 / Bearing (1) / 11-002-013 / Norgren regulator (4) / 1100310 / Arc current power supply (1) / 1100311 / Arc power supply (2) / 110040630 0692-0001-0001 / Silver brushes for rawson-lush gaussmeter set (2) / 1101490 / V2 source valve complete assorted styles (3) / 1101518 / Vaporizer p.s. (1) / 11017 / Microprocessor f9 (7) / 1101850R / Analyzer magnet p.s. master & slave (1) / 1101860 / Source magnet power supply (2) / 1102200 / 80kv water baffle (1) / 1102220 / Water flow meter (10) / 1102460 / Extraction electrode assy (2) / 1103600 / Amu controller b (2) / 1103670 / Sliding seal plate (6) / 11038800 / Waveguide (1) / 1104130 / High voltage resistor assy (1) / 1104430 / Y-scan monitor panel (2) / 1104900 / Accel/deccel p.s. (6) / 1105172 / V17 valve (2) / 1105440 / Gas control (6) / 1105441 / Leak valve acuator assembly (3) / 1105670 / Leak valve acuator assembly (1) / 110567-001 / Z80 processor (7) / 1105840 / Disk sensor bd 2 (1) / 1105950 / Rotary drive (3) / 1107000 / Disk faraday assy (2) / 1107130 / Door stepper p.s (3) / 1107320 / At-4 stepper p.s (2) / 1108180 / Rotating stage motor assembly (2) / 1108181 / Rotating stage motor assembly (1) / 1108700 / Control power assy (2) / 1108760 / Status display panel (3) / 110B110 / Sensors (900) / 111 / Buna-n 2-111 (2) / 111039012v 50a var. power supply (1) / 1110410 / Accel electrode complete (8) / 1110542 / Flag assy. (1) / 1111920 / Amu controller (1) / 1112290 / Remote beam con. (10) / 1112350 / Waveguide outer linear assy (1) / 1112540 / Gas box controller (2) / 1112560 / Flood power supply (3) / 1115040 / Dose controller (1) / 1115100B / Back cover vacuum controller (1) / 1115100F / Front panel vacuum controller (1) / 1115150 / Shorting bar (1) / 1115610 / Amu controller (1) / 1115620 / Amu controller (3) / 1115930 / Beam controller crt (1) / 1115970 / Light pipe com. (1) / 1116341 / Input vac chuck assy 6" (1) / 1116600 / Vaporizer power supply (1) / 1116750 / Remote disk beam controller (2) / 1119160 / Source beam controller (2) / 1120805 / Wafer stage (1) / 1120-8M-30 / Drive belt (2) / 1121150 / Flood power supply (1) / 1121230 / Rotary drive p.s. (178) / 1121406 / Copper gasket (2) / 1121450 / Control power assy (15) / 1121510 / Disk grounding kit (1) / 1122000 / Surpression p.s (1) / 1125470 / Chamber door sensor (22) / 1127550 / Source for 10-80/160 no vaporizer (8) / 1131407 / Filament single med current feedthru (1) / 1132161 / Remote terminal beam controller (1) / 1132191 / Remote vac beam con (1) / 1132221 / Remote disk beam con (1) / 1132230 / Source beam controller (2) / 1135882 / At-4 assembly (2) / 1137410 / At-4 alignment sensor (1) / 11377 / Modulas one 1020 (1) / 1139120 / Disk cooling plate (3) / 1140 ADAPTIVE SCIENCE CROP / Pcb (700) / 115 / Buna-n 2-115 (10) / 1152240 / Vaporizer heat shield (2) / 1152620 / Crucible assy (3) / 1153040 / Source control (1) / 1153430 / Accel wire (1) / 1154030 / Dual vaporizer source (1) / 1154830R / Screw driver assy (1) / 115673001 / U1 eprom (1) / 115673002 / U2 eprom (1) / 115684001 / Cpu tm990/307 (10) / 115866 / Copper .69in od 1in od 2in l (3) / 1158870 / V3 valve sliding seals (26) / 1159060 / Pin contact sub plate disk hub (650) / 116 / Buna-n 2-116 (1) / 116156001 TM990 / Cpu main modif tm990 (2) / 116201001 / Eprom u42 rev 1 vo.15 (2) / 116202001 / Eprom u43 rev1 vo.15 (2) / 116203001 / Eprom u44 rev1 vo.15 (2) / 116204001 / Eprom u45 rev1 vo.15 (1) / 116223001 / Double main eprom v020 (1) / 116223002 / Double main eprom v020 (1) / 116227001 / Tb eprom v.020 (3) / 1162800 / Exchange arm (6) / 1163720 / Source mounting flange (3) / 1164410 / Electron shower 4 (4) / 116441011 / Electron shower v 3 (1) / 1165270 / Valve cylinder v6 (7) / 1166700 / Clamp (1) / 1167070 / Hub disk new style (2) / 1167810 / Loading disk plate (1) / 1167930 / Dual enhanced vap 160 kv m2732afi (1) / 1168010 / Disk chamber sensor (4) / 1168460 / Proximity switch assy (1) / 1172530 / Source can (4) / 1174390 / Interlock switch assembly (4) / 1175307-1 / Gauge 300 psi 1/8 fitting (3) / 117692010 turn pot 2k ohms (1) / 117883 / Breaker w/ground fault protection 15a 120v (1) / 1180740 / Belt drive cooling tube (3) / 1181831 / Beam dump assy (1) / 1182480 / Extraction manipulator assy (1) / 1186221 / Feedthru plate (1) / 1190031 / Gyro cont (1) / 1192020125 mm modular wafer pickup arm (3) / 11SM1-T11sm1-t switch (4) / 11SX21-T / Mcrsw (7) / 11TS152 / Switch 11ts152 (4) / 120009 / Diode assy (2) / 12003037 C0 / Filter assy isolation trans (488) / 1200320 / Filament insulator insert (332) / 1200321 / Filament insulator insert b (9) / 1200470 / Linear bearing (5) / 12007151 / Extraction electrode plate (8) / 12007898 / Pump tube resistor (1) / 1200795800015 / Lead lined window (1) / 12008114-001 / Stop (1) / 12008147 / Switching transformer assy (2) / 12008291 / Filament preamp (2) / 12008315 / Accel/deccl ring (2) / 12008967 / Amu feedback resistor (4) / 12009811 / Solenod pre-amp (3) / 1200B / Beam monitor scope (5) / 1201340 / Bearing liner (4) / 1201350 / Liner bearing (1) / 1203019 / (9) Cherry mo cap key (9) / 12033800 / Bolts (3) / 1205000 / Filament supply for 20a ems 7.5v - 30 (1) / 12069521 / Gear for source (5) / 1210070 1210060 / Temp probe (3) / 121056 / Capacitor 2700 uf 25v (3) / 1210-90181 / Fixed 50w resistor (2) / 1214130 EMS 600V-1.6A-2-D-1286 / Ems 600v-1.6a-2-d-1286 (1) / 1215D12H / Dc/dc converter (1) / 122353 / Flow switch .25 gpm (1) / 123 / Scan feedthru (1) / 12392-08 / Temp switch 280c to 343c (304) / 125 / Buna-n 2-125 (2) / 1257 / Meter 0-10 2.5in (307) / 126 / Buna-n 2-126 (1) / 127231-000 / Regulator (1) / 1298-0001-1204 / Diode in1204 (238) / 130 / Buna-n 2-130 (8) / 130.002.034 / Platen 2 (6) / 130.005.002 / Platen drive belt (1) / 130-018-053 / Av target (3) / 133426 / Door lach (3) / 1348 ADAPTIVE SCIENCE CROP / Pcb (1) / 13-75-1-D / Ems power supply 13v 75a (1) / 140012 / Light pipe system (8) / 1400630 / Log radio module (2) / 140-40-017 / Load lock cover (10) / 140-415-097 / Clippard minimatic (5) / 14-131-025 / Push button dpst momentary switch 250 v, 5a (1) / 1417620 / Gasbox control di (1) / 141A-14319 / Mks vacuum switch type 141 (1) / 144001-6D / Eprom u28 (3) / 145-0040K-208N/60 / Hps valve (1) / 1450303 / Sensor g (5) / 147391 / Ferrollidics shutter on con mag (6) / 149F1 / At4 149f1 (2) / 14S9184 / Pump filters (6) / 15 MICRON 3/8 / Gas filter assembly (1) / 1500010 / I/v converter (1) / 1500017 / 50/60 ferro transformer (1) / 15000190 / Gas flow control (1) / 150002 / Control interface (2) / 15000201kw / EMS interface (1) / 1500026 / 500m resistor pcb assy (1) / 150003 / Prereg interface (2) / 150004 / KSI DC/DC Converter (2) / 150005 / Analog control (2) / 150006 / Variac control (5) / 1500070 / Arc current (1) / 1500080 / Slew control-dosimeter (1) / 1500093 / Digital control (1) / 1500094 / Overload (4) / 1500095 / Variac tube control (2) / 150012 / Kaiser upgrade kit (1) / 150014 / Control assy (1) / 1500180 / I/o port j2 (1) / 1500181 / I/o port j2 (2) / 1500182 / I/O Port J2 (2) / 1500183 / I/o port j8 (5) / 1500191 / Analog extension module j2 (1) / 1500192 / Analog Extension Module J4 (1) / 1500200 / Control panel readout (7) / 1500290 / Vaporizer temp control (1) / 1500301 / Status display (2) / 1500360 / Universal 50 pin interconnect (3) / 1500460 / Disk faraday filter (2) / 15-00475-00 / Seal (4) / 1500482 / Analyzer & source magnet supply (3) / 1500510 / Timer driver (2) / 1500530 / Temp limit control (2) / 1500600 / Amu front panel (14) / 15006-11/8 pipe to 10-32 (7) / 1500610 / Ic & cryo temp (5) / 1500620 / Logarithmic a/d converter (15) / 1500640 / Emission control a-8 (1) / 1500650 / Mother board (6) / 1500660 / I/o vacuum controller (3) / 1500670 / Motherboard vacuum controller (3) / 1500680 / Status display vac control (8) / 1500690 / Grid power supply (3) / 1500700 / Alpha numeric display (4) / 1500740 / Thumbwheel switch (1) / 15007440 / Amu remote (7) / 1500830 / Current volt converter (3) / 1500840 / Keyboard (8) / 1500850 / Alpha numeric display (2) / 1500870 / P2 (1) / 1500910 / Output Buffer BD (5) / 1500940 / Input buffer (1) / 1500970 / Flat sensor-collector (1) / 1500980 / Flat sensor-emitter (2) / 1500990 / Vaporizer control motherboard (4) / 1501000 / Power control vaporizer (3) / 1501020 / Electrode suppression sense (1) / 1501030 / Filament supply control (3) / 1501040 / Electrode divider readout (9) / 1501060 / Counter/timer a-8 (3) / 1501061 / Counter/timer fast scan only (3) / 1501070 / Filter (1) / 1501090 / Beam Lock (4) / 1501110 / Disk sensor bd 1 (1) / 1501142 / Motherboard (2) / 1501150 / Analyzer magnet supply (9) / 1501200 / A17 vacuum controller (6) / 1501210 / Pcb (3) / 1501250 / Status display pcb (1) / 1501270 / Faraday burn-thru sense (3) / 1501280 / Input/output cassette to cassette a-7 (1) / 1501290 / Led rotary drive (2) / 1501300 / Input i/o 80 (2) / 1501310 / Input to 990/305 (3) / 1501320 / Output buffer (5) / 1501330 / Stepper motor output interface (1) / 1501340 / End Station Controller Motherboard (5) / 1501360 / At-4 data acquisition (1) / 1501390 / Electron flood control panel (1) / 1501400 / Endstation front panel display (10) / 1501420 / Idx sensor assembly (1) / 1501490 / Data acquisition power supply (3) / 1501500 / Universal mother bd (1) / 1501620 / Data transceiver board (3) / 1501650 / Crt interface (1) / 1501660 / Stepper motor driver (3) / 15016701 / 1-channel transceiver (2) / 1501700 / Controller datalock slave (5) / 150171 / Manipulator assy (2) / 1501720 / Beam controller front panel input card (4) / 1501820 / Datalock/slave optoisolator (1) / 1501870 / Remote vac controller i/o (4) / 1501990 / Keyboard (1) / 15020300 / Plunger pos sense (2) / 1503010 / Cpu tm990/101 (8) / 1503040 / Memory board tm990/201-42 (11) / 1503060 / Controller remote (2) / 1503061 / Controller remote board (9) / 1503070 / Beam controller remote i/o (4) / 1503100 / Output buffer a-1 (7) / 1503180 / Beam remote controller (1) / 1503190 / Electron shower pcb (4) / 1503220 / Memory expansion (3) / 1503230 / Antilog a/d (1) / 1503440 / Gas box controller back (3) / 1503750 / Electrode suppression p.s (4) / 1503901 / Z80 controller (1) / 1503920 / Power fault detector (2) / 1504030 / I/o remote vac controller (3) / 1504080 / Cassette stepper controller (5) / 1504090 / Flat sensor collector (5) / 1504100 / Flat sensor emitter 150 mm (5) / 1504130 / Isolation inter-connect (2) / 1504180 / Emo remote (1) / 1504230 / AMU remote (4) / 1504260 / Electrode surge protection (2) / 1505420 / Pneumatic switch (4) / 1505430 / Speed controller (1) / 1505480 / Power fault interrupt generator (2) / 1505490 / Optoisolator (4) / 1505500 / Electron showers (1) / 1505561 / Front Panel Beam Controller (3) / 1505580 / Beam controller remote i/o b (5) / 1505650 / Faraday sensor (1) / 1505710 / Amu front panel b (3) / 1505720 / Amu ground level (6) / 1505750 / Output buffer (3) / 1505771 / Amu front panel d1 (3) / 1505810 / Data concentrator (1) / 1505950 / Remote log a/d board (1) / 1505951 / Remote log a/d (1) / 1505960 / Remote emissions controller (2) / 1507241 / Surge Protections (1) / 1507360 / Vac amu transceiver (10) / 1507380 / Exchange interface (1) / 1507400 / Optoisolator board dose controller (2) / 1507440 / Amu remote a (1) / 151-0025K / Valve (23) / 1515577 / Defining aperture a (7) / 1516900 / Cpu tm 990/101mb (1) / 1517030 / Current/Voltage Converter (1) / 1517410 / Terminal electric rack d.i (1) / 1517660180 cont remote (1) / 1517820 / Dedicated buffer board (1) / 1518150 / At-4 data acquisition (1) / 1519190 / Beam controller I/O (1) / 1519313 / Analog I/O (1) / 1519350 REV C / I/O vacuum controller (1) / 1519520 / Power distribution device interface (1) / 1519540 / Flag faraday filter (1) / 1519600 / 133 Cell controller PCB (3) / 1520044 / Scanner tube 3/8 plate cap (1) / 1520130 / Interconnect (1) / 1520210 / Baised output (1) / 1520470 / Electron Shower 4 (2) / 1520560 / Source controller di (1) / 1521080 / Std bus (1) / 1521110 / Std buss poss (1) / 1521250 / Pcb (1) / 1521300 / Dose cont. filter power (1) / 1521330 / Gsd v3 control bd (2) / 1521840 / Remote vac controller i/o (2) / 1522040 / Ems interface (1) / 1522250 / Master oscillator (1) / 1522670 / TI9900 CPU (25) / 1522725 / I/O TM990/310 E.S. A-8 (1) / 1522920 / Tc & cryo interlock board (1) / 1523280 / Creonics es encoder filter piggyback (4) / 1523530 / Emi power supply control (5) / 1550-0001-3001 / Electrode extraction (1) / 155-000-021 / Rotary union (1) / 155-000-062 / Rotor union 1-14 (8) / 1550-0013-3001 / Decel electrode (4) / 1550-0016-0001 / Filament electrode (23) / 1550-0017-0001 / 3 pc arc chamber top (9) / 1550-0036-0001 / High voltage aperture (1) / 1550-0037-0004 / Face plate 2 (2) / 1550-0038-0001 / High voltage electrode (1) / 1550302 / Sensor (3) / 15511 / Pm d.c. motor generator (1) / 15532116 / Tape drive and new tape (68) / 156 / Buna-n 2-156 (3) / 156-0067-01 / Ic (7) / 157 D / Vacuum controller eprom 80 kv (3) / 158-12B20012vdc cool two poles (3) / 15A 125V / Hubbell 15a 125v male socket (3) / 15K HIGH VOLTAGE RES15k high voltage resistor (1) / 15S0001 / Y-scan monitor (1) / 15S0303 / V notch emitter (1) / 1600046 / Tm990/305 endstation a-10 (1) / 1600700 / Cable extension (1) / 160-608-008 / Shaft anti torque (2) / 160-608-048 / Shaft ball (1) / 1613191 / Cable flag fday (1) / 1614630 / Motor (3) / 1621421 / Cable filament ps (3) / 1640 MODULUS ONE ADAPTIVE SCIENCE CROP / Pcb (1) / 165L / Timing belt (2) / 1666G2YA / Valve 5000 psi (1) / 16722 / Current integrator (1) / 1700141 / Filament feed thru left (28) / 1700240 / Vespel spacer (6) / 1700310 / .625 filament clamp (1) / 170033150 / Vap part (1) / 1700340 / Ball screw ass shaft (4) / 170065 / Gasket foam (4) / 1701450 / Sliding seals (4) / 1702040 / Accel/deccl (25) / 17021870 / Electron shower filament aperture (16) / 1703110 / Flexure (6) / 1703150 / Spcr flex (16) / 17032100 / Beam aperture (590) / 17032830 / Ceramic filament insulator (12) / 17033000 / Insulator h (15) / 17033030 / Feed Thru insulator (4) / 17033160 / Ball joint (6) / 17033170 / Filament feed starp (12) / 17033170B / Filament strap (4) / 17033330 / Dual vaporizer 1 1/8 tread with thermocouples (2) / 17034610 / Cap seal (2) / 17036670 / Dual vaporizer base plate (24) / 17037280 / Faraday flag top shield (11) / 17037280B / Source end cap for 20a (12) / 17037290 / Source end ring (3) / 17037680 / Electrode ground plate (21) / 17037760 / Low voltage aperture (4) / 17037900 / Ferro-ceramic insulator (2) / 17037940-B / Ex shield (48) / 17038680 / Pin 1/4 dia vesper (15) / 17043870 / 0.4 Filament clamp (1) / 17046020 / Blank off plate (14) / 17046670 / Mod. single gas base plate (29) / 17048870 / Face plate groove (1) / 1704940 / Curved field block (3) / 1704990 / Arc chamber side plate (5) / 1705001 / Single gas base plate (3) / 1705360 / Disk hub (4) / 17055991 / Vlv cover (4) / 17059460 / Screw plug (1) / 17059980 / - (2) / 1706000 / Spr trsn disk exch (40) / 17062340 / High energy electrode (17) / 17062350 / Hv electrode plate (1) / 17062500 / Graphite (1) / 1706370 / Nozzle vapriz (2) / 17063700 / Guide set (1) / 17063730 / Lift ring (5) / 1706380 / Vaporizer nozzle (25) / 17064260 / Ground electrode plate (3) / 1706440 / Filament shield ob (4) / 17065300 / Plate (9) / 17065360 / Faraday flag aperture (6) / 1706540 / Insul bshg 8 (35) / 17066871 / Plt strike faraday vg (1) / 17068110 / Brkt proximity switch (3) / 1707-1 / Kings 1707-1 rf/coaxial shv jack straight connectors (1) / 17074630 / Blank off plate 2.25 dia (60) / 1707760 / Filament 10-80 (9) / 17079740 / Gf bearing for extraction (6) / 1708220 / At-4 bushing (1) / 17083020 / Filament mounting block ins (6) / 17083680 / End plate 2 (1) / 1708520 / Graphite (1192) / 1708680 / Insulator (2) / 17087480 / Aperture accel assy 160k (20) / 17097240 / Insulator c (2) / 17099181 / Faraday aperture vt1 (2) / 17099200 / Gf (2) / 17099201 / Strike plate (7) / 17099631 / Inner beam dump vgi (2) / 17099671 / Outer end vgi (1) / 1709980 / Cylinder short stroke da6