Used AMAT / APPLIED MATERIALS / VARIAN Solion XP #9211008 for sale
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ID: 9211008
Vintage: 2012
Ion implanter
Max energy: 15 keV-PH3/H2
(16) Wafers on platen clamp on electrostatics E-chucks
(8) Loadports
(2) WTM (Wafer transfer module)
(4) Loadlocks (2 Per belts)
Transfer chamber
With (2) robots
Implantation chamber
Source chamber
Spare parts included
2012 vintage.
AMAT / APPLIED MATERIALS / VARIAN Solion XP is an ion implanter and monitor designed to produce high precision implants for applications ranging from integrated circuits to coated automotive parts. This advanced implanter/monitor is capable of producing ion implanments from a wide range of beam currents and doses, resulting in highly precise implants. AMAT Solion XP includes digital signal processing for signal isolation and noise reduction, a high-precision digital stage for precise implant placement, and a switching and control system for the highest levels of process control. VARIAN Solion XP is capable of producing implants from a wide range of beam currents and doses. This allows the operator to control the dosage, placement and purity of the implant, from low magnitude implants to high end implants of a few thousand KEV/Gauss. This precision also allows for implants that target specific layers or components within the implant area, resulting in a more refined implant and improved device performance. In addition to its ability to produce implants with great precision, APPLIED MATERIALS Solion XP also offers industry-standard user interfaces. This allows the user to monitor beam propagation and focus, manage and adjust beam parameters in real-time to achieve the best implant results. This user interface also provides real-time monitoring of the total tool status, allowing the operator to check the tool health and make sure there are no issues present. Solion XP also includes an expandable memory feature, effectively allowing for a virtually unlimited storage capacity for implant work-pieces. This means that larger pieces can be loaded, as well as multiple pieces, giving the operator complete control over the ion implantation process. Overall, AMAT / APPLIED MATERIALS / VARIAN Solion XP is a powerful, versatile and reliable ion implanter/monitor, capable of producing highly precise implants from a wide range of beams and doses. Its industry-standard user interface allows for easy monitoring and controlling of the implantation process, resulting in a highly accurate product. Its expandable memory feature also allows for multiple work-pieces to be loaded, and a virtually unlimited storage capacity.
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